Equipment Name Table

This table is a summary of all equipment available in the SNF Cleanroom, SNF MOCVD, and SNF-ExFab.
It is sortable by any of the headers in red, by the Equipment Name (typically the company name and processing technique) or Location.
Note:
The terms nSiL and ExFab are used interchangeably. ExFab lab was called nSiL years ago, and can still be found in the nSiL Badger tab.

Technique

Equipment name & Badger ID	Training Required & Charges	Cleanliness	Location
AFM-Asylum afm-asylum	AFM-Asylum Training 4.00 hours	Flexible	SNF Exfab Paul G Allen 151 Ocean
Aixtron Black Magic graphene CVD furnace aixtron-graphene	Aixtron Black Magic graphene CVD furnace training 1.00 hours	Flexible	SNF Exfab Paul G Allen L119 Año Nuevo
Aixtron MOCVD - III-N system aix-ccs	Aixtron MOCVD - III-N system training 4.00 hours	Clean (MOCVD)	SNF MOCVD Paul G Allen 213XA
Aixtron MOCVD - III-V system aix200	Aixtron MOCVD - III-V system training 4.00 hours	Flexible	SNF MOCVD Paul G Allen 213XA
AJA Evaporator aja-evap	AJA Evaporation training 1.00 hours	Flexible	SNF Exfab Paul G Allen 155A Venice
AJA2 Evaporator aja2-evap	AJA2 Evaporator 1.00 hours	Semiclean	SNF Cleanroom Paul G Allen L107
AllWin 610 RTA aw610_l	AllWin 610 RTA Training 1.00 hours	Clean	SNF Cleanroom Paul G Allen L107
AllWin 610 RTA (aw610_r) aw610_r	AllWin 610 RTA Training 1.00 hours	Flexible	SNF Cleanroom Paul G Allen L107
Alphastep 500 Profilometer alphastep	Alphastep 500 Profilometer Training 0.25 hours	Flexible	SNF Exfab Paul G Allen 104 Stinson
Alveole Primo alveole	Alveole Primo Training 2.00 hours	Flexible	SNF Exfab Paul G Allen 151 Ocean
AMAT Centurion Epitaxial System epi2	AMAT Centurion Epitaxial Training 4.00 hours	Clean	SNF Cleanroom Paul G Allen L107
AMAT P5000 Etcher p5000etch	AMAT P5000 Etcher Training 1.00 hours	Clean, Clean (Ge), Semiclean	SNF Cleanroom Paul G Allen L107
ASML PAS 5500/60 i-line Stepper asml	ASML PAS 5500/60 i-line Stepper Training 4.00 hours	All	SNF Cleanroom Paul G Allen L107
Biologic SP-300 biologic	BioLogic Potentiostat Training	Flexible	SNF Exfab Paul G Allen 155 Mavericks
CytoViva HSI cytoviva	Cytoviva Training 0.00 hours	Flexible	SNF Exfab Paul G Allen 151 Ocean
DISCO Backgrinder disco-backgrind	DISCO Backgrinder Training 2.00 hours	Flexible	SNF Exfab Paul G Allen 159 Capitola
DISCO Wafer Saw DISCO wafersaw	DISCO wafersaw training 2.00 hours	Flexible	SNF Exfab Paul G Allen 159 Capitola
Epilog Fusion M2 Laser Cutter lasercutter	Lasercutter Training 1.00 hours	Flexible	SNF Exfab Paul G Allen 155A Venice
EV Group Contact Aligner evalign	EV Group Contact Aligner Training 1.50 hours	All	SNF Cleanroom Paul G Allen L107
EV Group Wafer Bonder evbond	EV Group Wafer Bonder Training 4.00 hours	Flexible	SNF Cleanroom Paul G Allen L107
EVG 101 Spray Coater evgspraycoat	EVG 101 Spray Coater Training 1.50 hours	All	SNF Cleanroom Paul G Allen L107
Ex Fab Develop Wet Bench wbexfab_dev	WbExfab_Dev Training 1.00 hours	Flexible	SNF Exfab Paul G Allen 104 Stinson
Ex Fab Solvent Wet Bench wbexfab_solv	WbExfab_Solv Training 0.50 hours	Flexible	SNF Exfab Paul G Allen 104 Stinson
Fiji 1 ALD fiji1	Fiji 1 and 2 ALD Training 2.00 hours	Semiclean	SNF Cleanroom Paul G Allen L107
Fiji 2 ALD fiji2	Fiji 1 and 2 ALD Training 2.00 hours	Flexible	SNF Cleanroom Paul G Allen L107
Fiji 3 ALD fiji3	Fiji 3 ALD Training 2.00 hours	Flexible	SNF Cleanroom Paul G Allen L107
Finetech Lambda flipchipbonder	Flip Chip Bonder Training 1.00 hours	Flexible	SNF Exfab Paul G Allen 104 Stinson
First Nano carbon nanotube CVD furnace cvd-nanotube	cvd-nanotube training 3.00 hours	Flexible	SNF Exfab Paul G Allen L119 Año Nuevo
Fisher Accuspin 24C centrifuge	Centrifuge Training	Flexible	SNF Exfab Paul G Allen 155 Mavericks
Flexus 2320 Stress Tester stresstest	Flexus 2320 Stress Tester Training 0.75 hours	All	SNF Cleanroom Paul G Allen L107
Formlabs Form2 3D Printer form2-3d-printer	Form2 3D Printer Training	Flexible	SNF Exfab Paul G Allen 155 Mavericks
Fujifilm Dimatix Ink Jet Printer nanoinkjet	Dimatix Ink Jet Printer Training 7.00 hours	Flexible	SNF Exfab Paul G Allen 155 Mavericks
Fumehood 1 fumehood1	Fumehood 1 Training	Flexible	SNF Exfab Paul G Allen 155 Mavericks
Fumehood 2 fumehood2	Fumehood 2 Training 0.00 hours	Flexible	SNF Exfab Paul G Allen 155 Mavericks
Fumehood 3 fumehood3	Fumehood 3 Training 0.00 hours	Flexible	SNF Exfab Paul G Allen 155 Mavericks
Fumehood 4 fumehood4	Fumehood 4 Training 0.00 hours	Flexible	SNF Exfab Paul G Allen 155 Mavericks
Gasonics Aura Asher gasonics	Gasonics Aura Asher Training	Clean, Semiclean	SNF Cleanroom Paul G Allen L107
Glovebox-l glovebox-l	Glovebox-l Training	Flexible	SNF Exfab Paul G Allen 155 Mavericks
Glovebox-r glovebox-r	Glovebox-r Training	Flexible	SNF Exfab Paul G Allen 155 Mavericks
GnP POLI-400L cmp	CMP Training 1.50 hours	Flexible	SNF Exfab Paul G Allen 159 Capitola
Headway 3 Manual Resist Spinner headway3	Headway 3 Training 1.00 hours	All	SNF Exfab Paul G Allen 104 Stinson
Headway Manual Resist Spinner headway2	Headway Manual Resist Spinner Training 1.00 hours	All	SNF Cleanroom Paul G Allen L107
Heidelberg MLA 150 heidelberg	Heidelberg Training 2.00 hours	All	SNF Exfab Paul G Allen 104 Stinson
Heidelberg MLA 150 - 2 heidelberg2	Heidelberg Training 2.00 hours	All	SNF Cleanroom Paul G Allen L107
HMDS Vapor Prime Oven, YES yes	YES Prime Oven Training	All	SNF Cleanroom Paul G Allen L107
HMDS Vapor Prime Oven, YES2 yes2	Exfab YES2 HMDS oven training 0.00 hours	All	SNF Exfab Paul G Allen 104 Stinson
Hummer V Sputter Coater hummer	Hummer V Sputter Coater Training 1.00 hours	Flexible	SNF Exfab Paul G Allen L119 Año Nuevo
Ika T18 Disperser disperser	IKA Disperser Training	Flexible	SNF Exfab Paul G Allen 155 Mavericks
Innotec Evaporator Innotec	Innotec Evaporator Training 6.00 hours	Flexible	SNF Cleanroom Paul G Allen L107
Intlvac Evaporation Intlvac_evap	Intlvac Evaporation Training 2.00 hours	Clean, Semiclean	SNF Cleanroom Paul G Allen L107
Jasco UV-Vis-NIR jasco-uv-vis-nir	Jasco UV-Vis-NIR Training	Flexible	SNF Exfab Paul G Allen 151 Ocean
Karl Suss MA-6 Contact Aligner 1 karlsuss	Karl Suss MA-6 Contact Aligner 1 and 2 Training 1.50 hours	All	SNF Cleanroom Paul G Allen L107
Karl Suss MA-6 Contact Aligner 2 karlsuss2	Karl Suss MA-6 Contact Aligner 1 and 2 Training 1.50 hours	All	SNF Cleanroom Paul G Allen L107
Keyence Digital Microscope VHX-6000 keyence	Keyence Training 0.50 hours	All	SNF Exfab Paul G Allen 104 Stinson
Lakeshore Hall Measurement System LakeshoreHall	Lakeshore Hall Measurement System training 3.00 hours	All	SNF Exfab Paul G Allen 151 Ocean
Lam Research TCP 9400 Poly Etcher lampoly	Lam Research TCP 9400 Poly Etcher Training 1.00 hours	Clean, Semiclean	SNF Cleanroom Paul G Allen L107
Laurell Manual Resist Spinner laurell-R	Laurell Manual Resist Spinner Training 1.00 hours	All	SNF Cleanroom Paul G Allen L107
LEI1500 Contactless Sheet Resistance Mapping eddycurrent	LEI1500 Contactless Sheet Resistance Mapping Training 1.00 hours	All	SNF Exfab Paul G Allen 151 Ocean
Lesker Sputter lesker-sputter	Lesker Sputter Training 1.00 hours	Flexible	SNF Exfab Paul G Allen 155A Venice
Lesker2 Sputter lesker2-sputter	Lesker2 Sputter Training 1.00 hours	Semiclean	SNF Cleanroom Paul G Allen L107
Lithography Solvent Bench lithosolv	Lithography Solvent Bench Training	Flexible	SNF Cleanroom Paul G Allen L107
Malvern Dynamic Light Scattering (DLS) Zetasizer malvern-dls	Malvern Dynamic Light Scattering (DLS) Zetasizer Training	Flexible	SNF Exfab Paul G Allen 155 Mavericks
Mask Scrubber masksrub	Mask Scrubber Training	All	SNF Cleanroom Paul G Allen L107
Matrix Plasma Resist Strip matrix	Matrix Plasma Resist Strip Training 0.50 hours	Flexible	SNF Cleanroom Paul G Allen L107
micromanipulator6000 IV-CV probe station micromanipulator6000	micromanipulator6000 IV-CV probe station Training 0.50 hours	All	SNF Exfab Paul G Allen 151 Ocean
Minitech-GX Micromill micromill	Micromill Training 1.00 hours	Flexible	SNF Exfab Paul G Allen 155 Mavericks
MRC Reactive Ion Etcher mrc	MRC Reactive Ion Etcher Training 1.00 hours	Flexible	SNF Cleanroom Paul G Allen L107
MVD mvd	MVD Training 3.00 hours	Flexible	SNF Cleanroom Paul G Allen L107
Nanoscribe Photonics GT nanoscribe	Nanoscribe Photonics GT Training 2.00 hours	Flexible	SNF Exfab Paul G Allen 104 Stinson
Nanospec 210XP nanospec2	Nanospec Training 0.25 hours	All	SNF Exfab Paul G Allen 104 Stinson
Nanospec 3 nanospec3	Nanospec 3 Training	All	SNF Cleanroom Paul G Allen L107
Optomec Printer optomec-printer	Optomec Printer Training 14.00 hours	Flexible	SNF Exfab Paul G Allen 155A Venice
Oriel Deep UV Exposure Lamp oriel-duv	Oriel DUV Training	Flexible	SNF Exfab Paul G Allen 155A Venice
Oven 110°C post-bake oven110	110°C Oven Training	All	SNF Cleanroom Paul G Allen L107
Oven 90°C prebake oven90	90°C Oven Training	All	SNF Cleanroom Paul G Allen L107
Oven BlueM 200°C to 430°C bluem	Blue M Oven Training 0.50 hours	Flexible	SNF Cleanroom Paul G Allen L107
Oxford Dielectric Etcher oxford-rie	Oxford Dielectric Etcher Training 1.00 hours	Flexible	SNF Cleanroom Paul G Allen L107
Oxford III-V etcher Ox-35	Oxford III-V etcher Training 1.50 hours	Flexible	SNF Cleanroom Paul G Allen L107
PDMS Hotplate hotplate-1	PDMS Hotplate Training 0.00 hours	Flexible	SNF Exfab Paul G Allen 155 Mavericks
PDMS Spin Coater spincoat-g3p8	PDMS Spin Coater Training 0.00 hours	Flexible	SNF Exfab Paul G Allen 155 Mavericks
PDMS Workbench	PDMS Workbench Training	Flexible	SNF Exfab Paul G Allen 155 Mavericks
PDS 2010 LABCOTER™ 2 Parylene Deposition System parcoater	Parylene Coater Training 3.00 hours	Flexible	SNF Exfab Paul G Allen 155 Mavericks
Plasma Therm Versaline LL ICP Deep Silicon Etcher PT-DSE	Plasma Therm Versaline LL ICP Deep Silicon Etcher Training 1.50 hours	Flexible	SNF Cleanroom Paul G Allen L107
Plasma Therm Versaline LL ICP Dielectric Etcher PT-Ox	Plasma Therm Versaline LL ICP Dielectric Etcher Training 1.50 hours	Flexible	SNF Cleanroom Paul G Allen L107
Plasma Therm Versaline LL ICP Metal Etcher PT-MTL	Plasma Therm Versaline LL ICP Metal Etcher Training 1.50 hours	Flexible	SNF Cleanroom Paul G Allen L107
Plasmaetch PE-50 plasma-etch	Plasmaetch PE-50 Training 0.50 hours	Flexible	SNF Exfab Paul G Allen 155 Mavericks
PlasmaTherm Shuttlelock PECVD System ccp-dep	PlasmaTherm Shuttlelock PECVD System Training 1.00 hours	All	SNF Cleanroom Paul G Allen L107
PlasmaTherm Versaline HDP CVD System hdpcvd	PlasmaTherm Versaline HDP CVD System Training 1.00 hours	All	SNF Cleanroom Paul G Allen L107
Prometrix Resistivity Mapping System prometrix	Prometrix Training 0.50 hours	All	SNF Cleanroom Paul G Allen L107
QSonica Q700 Sonicator sonicator	Probe Sonicator Training	Flexible	SNF Exfab Paul G Allen 155 Mavericks
Reflectance Spectrometer Filmetrics F40 filmetrics	Reflectance Spectrometer Filmetrics F40 Training	All	SNF Cleanroom Paul G Allen L107
Samco PC300 Plasma Etch System samco	Samco Training 0.50 hours	Flexible	SNF Cleanroom Paul G Allen L107
Savannah ALD savannah	Savannah Training 1.50 hours	Flexible	SNF Cleanroom Paul G Allen L107
Sensofar S-neox s-neox	Sensofar S-neox Training 1.00 hours	All	SNF Cleanroom Paul G Allen L107
Sinton Lifetime Tester sinton-lifetime-tester	Sinton Lifetime Tester Training 1.00 hours	Flexible	SNF Exfab Paul G Allen 151 Ocean
Solidscape Wax 3D Printer 3d-wax-printer	Solidscape 3D Wax Printer Training	Flexible	SNF Exfab Paul G Allen 151 Ocean
SPF Measurement Bench	SPF Measurement Bench Training		SNF SPF Paul G Allen 138 SPF
SPTS uetch vapor etch uetch	SPTS uetch vapor etch Training 0.50 hours	All	SNF Cleanroom Paul G Allen L107
STS Deep RIE Etcher stsetch	STS Deep RIE Etcher Training 1.00 hours	Clean, Semiclean	SNF Cleanroom Paul G Allen L107
SVG Develop Track 1 svgdev	SVG Resist Develop tracks 1 and 2 Training 0.50 hours	All	SNF Cleanroom Paul G Allen L107
SVG Develop Track 2 svgdev2	SVG Resist Develop tracks 1 and 2 Training 0.50 hours	All	SNF Cleanroom Paul G Allen L107
SVG Resist Coat Track 1 svgcoat	SVG Resist Coat Tracks 1 and 2 Training 1.25 hours	All	SNF Cleanroom Paul G Allen L107
SVG Resist Coat Track 2 svgcoat2	SVG Resist Coat Tracks 1 and 2 Training 1.25 hours	All	SNF Cleanroom Paul G Allen L107
Technics Asher technics	Technics Asher Training 0.50 hours	Flexible	SNF Cleanroom Paul G Allen L107
Tencor P2 Profilometer p2	Tencor P2 Profilometer Training 0.50 hours	Clean, Semiclean	SNF Cleanroom Paul G Allen L107
Teos SiO2 Deposition Furnace teos2	Teos Deposition Furnace Training 3.00 hours	Clean	SNF Cleanroom Paul G Allen L107
Thermco LTO Deposition Furnace thermcoLTO	Thermco LTO Deposition Furnace Training 3.00 hours	Flexible	SNF Cleanroom Paul G Allen L107
Thermco Nitride Deposition Furnace LPCVD thermconitride1	Thermco Nitride Deposition Furnace Training 3.00 hours	Clean	SNF Cleanroom Paul G Allen L107
Thermco1 Oxidation Furnace thermco1	Thermco Oxidation Furnaces Training 1.00 hours	Clean	SNF Cleanroom Paul G Allen L107
Thermco3 Oxidation Furnace thermco 3	Thermco Oxidation Furnaces Training 1.00 hours	Clean	SNF Cleanroom Paul G Allen L107
Thermco4 Oxidation Furnace thermco4	Thermco Oxidation Furnaces Training 1.00 hours	Flexible	SNF Cleanroom Paul G Allen L107
ThermcoPoly1 thermcopoly1	Thermco Poly Deposition Furnace Training 3.00 hours	Clean	SNF Cleanroom Paul G Allen L107
ThermcoPoly2 thermcopoly2	Thermco Poly Deposition Furnace Training 3.00 hours	Flexible	SNF Cleanroom Paul G Allen L107
Thermolyne thermolyne	Thermolyne Muffle Furnace Training	Flexible	SNF Exfab Paul G Allen 159 Capitola
Thermoscientific Oven thermoscientific-oven	Thermoscientific Oven Training 0.00 hours	Flexible	SNF Exfab Paul G Allen 155 Mavericks
Thinky AR-100 Mixer thinky-mixer	Thinky Mixer Training	Flexible	SNF Exfab Paul G Allen 155 Mavericks
Tousimis Automegasamdri-915B Critical Point Dryer cpd	Critical Point Dryer Training 2.00 hours	Flexible	SNF Cleanroom Paul G Allen L107
Tylan9 Forming Gas Anneal Furnace tylan9	Forming Gas Anneal Furnace Training 1.00 hours	Flexible	SNF Cleanroom Paul G Allen L107
TylanBPSG tylanbpsg	TylanBPSG Deposition Furnace Training 3.00 hours	Clean, Semiclean	SNF Cleanroom Paul G Allen L107
Tylanfga Forming Gas Anneal Furnace tylanfga	Forming Gas Anneal Furnace Training 1.00 hours	Semiclean	SNF Cleanroom Paul G Allen L107
Ultraviolet Photoresist Cure uvcure	Ultraviolet Photoresist Cure Training	All	SNF Cleanroom Paul G Allen L107
Voltera voltera	Voltera Training	Flexible	SNF Exfab Paul G Allen 151 Ocean
Wet Bench Clean 1 wbclean-1	Wet Bench Clean 1 and 2 Training 2.25 hours	Clean	SNF Cleanroom Paul G Allen L107
Wet Bench Clean 2 wbclean-2	Wet Bench Clean 1 and 2 Training 2.25 hours	Clean	SNF Cleanroom Paul G Allen L107
Wet Bench Clean_res- hotphos wbclean_res-hotphos	Wet Bench Clean Piranha/HF/Phosphoric Training 2.25 hours	Clean	SNF Cleanroom Paul G Allen L107
Wet Bench Clean_res-hf wbclean_res-hf	Wet Bench Clean Piranha/HF/Phosphoric Training 2.25 hours	Clean	SNF Cleanroom Paul G Allen L107
Wet Bench Clean_res-piranha wbclean_res-piranha	Wet Bench Clean Piranha/HF/Phosphoric Training 2.25 hours	Clean	SNF Cleanroom Paul G Allen L107
Wet Bench CMOS Metal (wbclean3) wbclean3	Wet Bench CMOS Metal (wbclean3) Training	Semiclean	SNF Cleanroom Paul G Allen L107
Wet Bench Decontamination wbdecon	Wet Bench Decontamination Training	Clean	SNF Cleanroom Paul G Allen L107
Wet Bench Flexcorr 1 wbflexcorr-1	Wet Bench Flexcorr 1and2 and 3and4 Training 2.25 hours	Flexible	SNF Cleanroom Paul G Allen L107
Wet Bench Flexcorr 2 wbflexcorr-2	Wet Bench Flexcorr 1and2 and 3and4 Training 2.25 hours	Flexible	SNF Cleanroom Paul G Allen L107
Wet Bench Flexcorr 3 wbflexcorr-3	Wet Bench Flexcorr 1and2 and 3and4 Training 2.25 hours	Flexible	SNF Cleanroom Paul G Allen L107
Wet Bench Flexcorr 4 wbflexcorr-4	Wet Bench Flexcorr 1and2 and 3and4 Training 2.25 hours	Flexible	SNF Cleanroom Paul G Allen L107
Wet Bench Flexible Solvents wbflexsolv	Wet Bench Flexible Solvents 1 and 2 Training 0.50 hours	Flexible	SNF Cleanroom Paul G Allen L107
Wet Bench Flexible Solvents 1 wbflexsolv-1	Wet Bench Flexible Solvents 1 and 2 Training 0.50 hours	Flexible	SNF Cleanroom Paul G Allen L107
Wet Bench Flexible Solvents 2 wbflexsolv-2	Wet Bench Flexible Solvents 1 and 2 Training 0.50 hours	Flexible	SNF Cleanroom Paul G Allen L107
Wet Bench Miscellaneous wbmiscres	Wet Bench Miscellaneous Photoresist Training	Flexible	SNF Cleanroom Paul G Allen L107
Wet Bench Resist Strip wbresstrip-1	Wet Bench Resist Strip 0.75 hours	Clean (Ge), Semiclean, Flexible	SNF Cleanroom Paul G Allen L107
White Oven white-oven	White Oven Training 0.50 hours	Flexible	SNF Cleanroom Paul G Allen L107
Woollam woollam	Woollam Training 1.00 hours	All	SNF Cleanroom Paul G Allen L107
Xactix Xenon Difluoride Etcher xactix	Xactix Xenon Difluoride Etcher Training 0.50 hours	All	SNF Cleanroom Paul G Allen L107
Xplore Micro Compounder N/A	Micro Compounder training 0.00 hours	Flexible	SNF Exfab Paul G Allen 159 Capitola

Last modified: 16 Feb 2023

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Equipment

Equipment Name Table