Vapor Etching
| Equipment name & Badger ID | Location | Image | Overview | Primary Materials Etched | Link to Training |
|---|---|---|---|---|---|
|
SPTS uetch vapor etch uetch |
SNF Cleanroom Paul G Allen L107 |
 |
The SPTS uetch vapor system uses anhydrous HF and ethanol at reduced pressure and 45C...Read more | SPTS uetch vapor etch Training | |
|
Xactix Xenon Difluoride Etcher xactix |
SNF Cleanroom Paul G Allen L107 |
 |
The Xactix e-1 is a XeF2 (xenon difluoride) isotropic silicon etcher. XeF2 is a vapor...Read more |
Xactix Xenon Difluoride Etcher Training |
