Skip to content Skip to navigation

Vapor Etching

Equipment name & Badger ID Location Image Overview Primary Materials Etched Link to Training
SPTS uetch vapor etch
uetch
SNF Cleanroom Paul G Allen L107
photo of uetch in SNF Cleanroom
The SPTS uetch vapor system uses anhydrous HF and ethanol at reduced pressure and 45C...Read more SPTS uetch vapor etch Training
Xactix Xenon Difluoride Etcher
xactix
SNF Cleanroom Paul G Allen L107

The Xactix e-1 is a XeF2 (xenon difluoride) isotropic silicon etcher.  XeF2 is a vapor...Read more

Xactix Xenon Difluoride Etcher Training