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Plasma Therm Versaline LL ICP Dielectric Etcher Training

Lab Facility: 
SNF Cleanroom
Training Charges: 
1.50 hours
Primary Trainer: 
Lavendra Mandyam
Backup Trainer(s): 
Cliff Knollenberg
Primary Maintenance: 
Elmer Enriquez
Backup Maintenance: 
Mike Dickey

Steps to become a tool user

  1. Become a member of SNF.
  1. This training is common for both PT-OX and PT-MTL etchers.
  2. Check the training calendar to for any scheduled training:
    .
  3. Contact the primary trainer,
    , to sign up for the training.
  4. Read the relevant operating procedures before the training session.
  5. Online training and completing the quiz is required. See Online training required. Open Online Course for general information about the online training. for general information about the Lagunita online training.
    Go to  Go to Online Nano Course Login to log in directly to the course. to log in directly to the course. Go to "nano@stanford" and then to the "PlasmaTherm Etchers Guide" section for watching the video and taking the quiz. For optional overview of plasma etching and how to choose an etcher, go to the "Dry Etching" Section for the three videos on plasma etching principles and "Choosing a Dry Etching Process" section for guidelines for choosing the right equipment.
  6. Complete the quiz on equipment operations.  Attend the training to get qualified.

Equipment Covered by this Training

Plasma Therm Versaline LL ICP Dielectric Etcher (PT-Ox)