Lam Research TCP 9400 Poly Etcher Training
Steps to become a tool user
Check the training calendar for any scheduled training:
Read the relevant operating procedures:
Online training is optional. See Online training required. Open Online Course
for general information about the online training. for general information about the Lagunita online training.
Go to Go to Online Nano Course Login
to log in directly to the course. to log in directly to the course. Go to "nano@stanford" and then to the "Dry Etching" section for the three videos on plasma etching principles and to "Choosing a Dry Etching Process" section for guidelines for choosing the right equipment.
Attend the in-person training session to get qualified.
Equipment Covered by this Training