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MRC Reactive Ion Etcher Training

Lab Facility: 
SNF Cleanroom
Training Charges: 
1.00 hours
Primary Trainer: 
Lavendra Yadav Mandyam
Primary Maintenance: 
Elmer Enriquez
Backup Maintenance: 
Mike Dickey

Steps to become a tool user

  1. Become a member of SNF.
  1. Check the training calendar for any scheduled training:
    .
  2. Contact the primary trainer,
    , to sign up for the training or to schedule a training if none is scheduled.
  3. Read the relevant operating procedures:
  4. Online training is optional. See Online training required. Open Online Course for general information about the online training. for general information about the Lagunita online training.
    Go to  Go to Online Nano Course Login to log in directly to the course. to log in directly to the course.Go to "nano@stanford" and then to the "Dry Etching" section for the three videos on plasma etching principles and to "Choosing a Dry Etching Process" section for guidelines for choosing the right equipment.
  5. You can also shadow and experienced user and submit the completed shadowing form to get qualified.
  6. Get qualified by either attending the training or submitting the shadowing form.

Equipment Covered by this Training

MRC Reactive Ion Etcher (mrc)