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Metal Clean

Cleanliness Equipment name & Badger ID Location Image Overview Link to Training
Flexible Wet Bench Flexcorr 1
wbflexcorr-1
SNF Cleanroom Paul G Allen L107

The Wet Bench Flexcorr1, part of the Wet Bench 1and2, is a manual wet chemical station used for etching or...Read more

Wet Bench Flexcorr 1and2 and 3and4 Training

Documentation

  • Post-metal etch clean

    Procedures for troubleshooting post Nb-etch residues on Sapphire wafers are described.