Equipment name & Badger ID | Location | Image | Overview | Primary Materials Etched | Link to Training |
---|---|---|---|---|---|
AMAT P5000 Etcher p5000etch |
SNF Cleanroom Paul G Allen L107 |
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P5000 is a load-locked, magnetically enhanced reactive ion etching system (MERIE) with two functional process...Read more |
AMAT P5000 Etcher Training | |
Gasonics Aura Asher gasonics |
SNF Cleanroom Paul G Allen L107 |
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The Gasonics Aura Asher is an automated downstream microwave plasma system used for stripping photoresist...Read more |
Gasonics Aura Asher Training | |
Lam Research TCP 9400 Poly Etcher lampoly |
SNF Cleanroom Paul G Allen L107 |
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Lam 9400 TCP is a Polysilicon DryEtcher with Envision software; Clean category; for polysilicon and...Read more |
Lam Research TCP 9400 Poly Etcher Training | |
Matrix Plasma Resist Strip matrix |
SNF Cleanroom Paul G Allen L107 |
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The Matrix plasma asher is used to strip photoresist from contaminated wafers using a combination...Read more |
Matrix Plasma Resist Strip Training | |
MRC Reactive Ion Etcher mrc |
SNF Cleanroom Paul G Allen L107 |
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The MRC is a general purpose, plasma reactive ion etching system, used to etch a...Read more | MRC Reactive Ion Etcher Training | |
Oxford Dielectric Etcher oxford-rie |
SNF Cleanroom Paul G Allen L107 |
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Oxford-rie is a capacitively coupled plasma (ccp) etch equipment with fluorine based etch gases and...Read more | Oxford Dielectric Etcher Training | |
Oxford III-V etcher Ox-35 |
SNF Cleanroom Paul G Allen L107 |
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The Oxford III-V Etcher (Ox-35) is an inductively-coupled plasma (ICP) reactive ion etcher (RIE), designed...Read more |
Oxford III-V etcher Training | |
Plasma Therm Versaline LL ICP Deep Silicon Etcher PT-DSE |
SNF Cleanroom Paul G Allen L107 |
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PT-DSE is an ICP (Inductively Coupled Plasma) etch system configured for Si etches using Bosch...Read more | Plasma Therm Versaline LL ICP Deep Silicon Etcher Training | |
Plasma Therm Versaline LL ICP Dielectric Etcher PT-Ox |
SNF Cleanroom Paul G Allen L107 |
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The Versaline LL-ICP Oxide Etcher was acquired in late 2011 for precision silicon oxide and...Read more | Plasma Therm Versaline LL ICP Dielectric Etcher Training | |
Plasma Therm Versaline LL ICP Metal Etcher PT-MTL |
SNF Cleanroom Paul G Allen L107 |
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The Versaline LL-ICP Metal Etcher was acquired in late 2011 for precision metal etching on...Read more |
Plasma Therm Versaline LL ICP Metal Etcher Training | |
Plasmaetch PE-50 plasma-etch |
SNF Exfab Paul G Allen 155 Mavericks |
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The Plasmaetch PE-50 is located in Venice, and is used primarily for surface treatment, for...Read more |
Plasmaetch PE-50 Training | |
Samco PC300 Plasma Etch System samco |
SNF Cleanroom Paul G Allen L107 |
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Samco Training | ||
STS Deep RIE Etcher stsetch |
SNF Cleanroom Paul G Allen L107 |
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This is a ICP (Inductive Charged Plasma) Deep Reactive Ion etcher from Surface Technology Systems....Read more |
STS Deep RIE Etcher Training | |
Technics Asher technics |
SNF Cleanroom Paul G Allen L107 |
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Technics PE II-A is used for descum, resist strip and surface treatment with O2 plasma...Read more |
Technics Asher Training |