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Chemicals List

These are the chemicals (commmon name and chemical formula) provided for lab users. If you would like to use other chemicals, please consult the PROM Committee.

Acids

20:1 BOE (38% NH₄F, 2% HF, 60% H₂O)

50:1 HF (50:1 HF)

6:1 BOE (34% NH₄F, 7% HF, 59% H₂O)

85% Phosphoric Acid (H₃PO₄)

9:1 Piranha (9:1 H₂SO₄:H₂O₂)

SC1 (5:1:1 H₂O:H₂O₂:NH₄OH)

SC2 (H₂O:H₂O₂:HCl (5:1:1))

Metal Etchants

Al-Etch (Phosphoric acid based)

Chrome Etch

Gold Etchant

Ti-Etch (H₂O₂)

W-etch (H2O2)

Developers

AZ 1:1

MF-26A developer

Resists

AZ5214IR

LOL

LOR

PMMA ((C₅O₂H₈)_n)

Shipley 3612 resist

SPR 955 CM-.7 resist

SPR220-3 resist

SPR220-7

SU-8

Other Chemicals

CO2 (liquid) (CO₂)

Primers

HMDS ([(CH₃)₃Si]₂NH)

Bases

KOH (KOH)

Resist Remover

PRS-1000

SRS-100

Last modified: 1 Feb 2023