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Step Profile

Technique Tabs

Main Tab

Processing Techniques	Equipment name & Badger ID	Teaser Blurb	Cleanliness	Location
Step Profile	Alphastep 500 Profilometer alphastep	Surface profiler measures step heights from 500 Å to 300 µm on materials in the flexible cleanliness group.	Flexible	SNF Exfab Paul G Allen 104 Stinson
Step Profile	Tencor P2 Profilometer p2	Surface profiler measures step heights from 500 Å to 80 µm on materials in the clean cleanliness group.	Clean, Semiclean	SNF Cleanroom Paul G Allen L107

Detail Tab

Processing Technique	Equipment name & Badger ID	Cleanliness	Substrate Size	Maximum Load (number of wafers)	Notes
Step Profile	Alphastep 500 Profilometer alphastep	Flexible	Pieces 2" 3" 4" 6"	1	500Å to 300µm
Step Profile	Tencor P2 Profilometer p2	Clean, Semiclean	Pieces 2" 3" 4" 6" 8"	1	Step height measurement range 500 Å to 80 µm