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Ellipsometry is a non-destructive, non-contact analysis method that can be used to characterize thickness (depth), crystalline nature, doping concentration, electrical conductivity, composition, and other material properties of thin films.

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Equipment name & Badger ID Location Image Overview Link to Training
SNF Cleanroom Paul G Allen L107

The Woollam tool uses ellipsometry to characterize thin films.  Ellipsometry detects the phase change in polarized light as it reflects from or transmits through samples.  The Woollam does not directly...Read more

Woollam Training