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Sputtering

Sputtering is a physical vapor deposition method of thin film deposition. This involves ejecting material from a "target" that is a source onto a "substrate".

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Equipment name & Badger ID Location Image Overview Materials Lab Supplied Link to Training
Hummer V Sputter Coater
hummer
SNF Exfab Paul G Allen L119 Año Nuevo

The Technics Hummer V is a manually controlled table top...

Hummer V Sputter Coater Training
Lesker Sputter
lesker-sputter
SNF Exfab Paul G Allen 155A Venice
SNF-Lesker sputter

Lesker is a load locked single wafer metal sputter providing...

Lesker Sputter Training
Lesker2 Sputter
lesker2-sputter
SNF Cleanroom Paul G Allen L107
Lesker2-Sputter

Lesker2 is a load locked single wafer metal sputter providing...

Lesker2 Sputter Training
Metalica Sputter
metalica
SNF Cleanroom Paul G Allen L107
photo of metalica

Metalica is a metal sputter that was built “in-house” to...

Metalica Sputter Training
Oerlikon Leybold Sputter Oerlikon Leybold Univex 400 RF/DC Sputter Station Training

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