Sputtering

Project

• Controlled metal Deposition on Flexible Polyethylene Substrates by Sputtering for CO2 Reduction

• Cuprite (Cu2O) Rydberg Excitons for Integration with Photonics

• Optimizing the Electrical Stability of Platinum Films Deposited in Lesker - Sputter

• Physical and Electrical Characterization of RF-Sputtered ITO Films for Use as Solar Cell Electrodes as well as Interlayers in Low-Resistance MIS Contacts in Ge/Si Transistors

• Sputtering Deposition of Metal and Dielectric Films

• Superconducting Parallel Plate Capacitors with High Kinetic Inductance

Documentation

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  Cuprite (Cu2O) Rydberg Excitons for Integration with Photonics

  We aim to develop a process to thermally oxidize Cu and reliably grow Cu2O for the purpose of photonics integration, and ultimately probe the promise of this platform for nonlinear and quantum optics experiments

• 

  Lesker2 Sputter TiN Initial Development

  Our goal was to develop a process for sputtering of NVM-quality TiN using the new Lesker sputtering tool (Lesker-2) that resides inside the cleanroom. This tool can achieve the high-vacuum pressures necessary for TiN films with low levels of oxygen contamination.

• Optimizing the Electrical Stability of Platinum Films Deposited in Lesker-Sputter- Final Presentation

• Optimizing the Electrical Stability of Platinum Films Deposited in Lesker-Sputter- Final Report

• Physical and Electrical Characterization of Sputtered ITO Films for Use as Solar Cell Electrodes as Well as Interlayers in Low- Resistance MIS Contacts in Ge/Si Transistors- Final Presentation

• 

  SOP- Cuprite Growth

  The SOP with details for Cuprite growth is documented here.

• Sputtering Deposition of Metal and Dielectric Films- Final Report

• Sputtering deposition of metals and dielectrics- Final Presentation