Sputtering is a physical vapor deposition method of thin film deposition. This involves ejecting material from a "target" that is a source onto a "substrate".
Equipment name & Badger ID | Location | Image | Overview | Materials Lab Supplied | Link to Training |
---|---|---|---|---|---|
Hummer V Sputter Coater hummer |
SNF Exfab Paul G Allen L119 Año Nuevo |
The Technics Hummer V is a manually controlled table top... |
Hummer V Sputter Coater Training | ||
Lesker Sputter lesker-sputter |
SNF Exfab Paul G Allen 155A Venice |
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Lesker is a load locked single wafer metal sputter providing... |
Lesker Sputter Training | |
Lesker2 Sputter lesker2-sputter |
SNF Cleanroom Paul G Allen L107 |
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Lesker2 is a load locked single wafer metal sputter providing... |
Lesker2 Sputter Training |