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Tool Monitoring

The Tool Monitoring is run with the help of our interns from community colleges.

Click here to find out more about the Community College Internship program.

Here is a list of tools we currently monitor:

ALD Savannah

ALD Fiji2

Dry etchers:

HDPCVD

Oxford-RIE

Oxford-35

Pt-Ox

Samco

 

Reflectometry, nanospec2 and nanospec3

 

Mask Aligner Direct Write Heidelberg

Mask Aligner Direct Write Heidelberg2

Resist Coat svgtrack

Resist Coat svgtrack2

Last modified: 22 Apr 2024