Deposition

Deposition covers a wide variety of methods that are used to add a wide variety of materials. The subcategories here can be useful to help narrow down your search.

Atomic Layer Deposition (ALD) is used to deposit less than 50nm of highly conformal films.
Chemical Vapor Deposition (CVD) is used to deposit films less than 5μm thick, carbon nanotubes, and graphene.
Deposited III-N uses a type of CVD called MOCVD to deposit the nitrides of materials that are found in group III of the periodic table.
Deposited III-V uses a type of CVD called MOCVD to deposit combinations of materials from group III and group V of the periodic table.
Ink lists the equipment that can be used to print inks that are either commercially available or made by the user.
Physical Vapor Deposition (PVD) is used to deposit primarily metal layers as well as some dielectrics.

Equipment name & Badger ID	Location	Overview	Materials Lab Supplied	Link to Training
Aix-ccs aix-ccs	SNF MOCVD Paul G Allen 213XA	Aixtron MOCVD for III-N semiconductors: InN, GaN, AlN, InGaN, InAlN,...	AlGaN AlN GaN InAlN InGaAlN InGaN InN	Aixtron MOCVD - III-N system training
Aix200 aix200	SNF MOCVD Paul G Allen 213XA	Aixtron MOCVD for III-V and dilute nitride semiconductors: InAs, GaAs,...	AlAs AlGaAs GaAs GaP GaPN III-V materials InAs InGaAs InGaAsN	Aixtron MOCVD - III-V system training
Aixtron Black Magic graphene CVD furnace aixtron-graphene	SNF Exfab Paul G Allen L119 Año Nuevo	CVD-Graphene The Aixtron Black Magic CVD furnace is dedicated to...	C	Aixtron Black Magic graphene CVD furnace training
AJA Evaporator aja-evap	SNF Exfab Paul G Allen 155A Venice	The AJA e-beam evaporator can be used to directionally deposit...	Ag Al Au Co Cr Cu Fe Ge Hf Ni Ni_xO_y Pd Pt SiO₂ Ti Alumina Titania	AJA Evaporation training
AJA2 Evaporator aja2-evap	SNF Cleanroom Paul G Allen L107	The AJA e-beam evaporator can be used to directionally deposit...	Ag Al Co Cr Ge Hf Nb Pd Pt Si Ta Ti V W Zr Moly	AJA2 Evaporator
Epi2 epi2	SNF Cleanroom Paul G Allen L107	Epi2 is the the first chamber on the tool and...	Ge Si SiGe Poly Silicon	AMAT Centurion Epitaxial Training
Fiji 1 fiji1	SNF Cleanroom Paul G Allen L107	Fiji1 is a load-locked, plasma-enabled atomic layer deposition (ALD) system....	Metal oxides HfN Pt Ru SiO₂ Ta₂O₅ TaN TiN Various Alumina Hafnia Titania Zirconia	Fiji 1 and 2 Training
Fiji 2 fiji2	SNF Cleanroom Paul G Allen L107	Fiji2 is a load-locked, plasma-enabled atomic layer deposition (ALD) system....	Metal oxides Ga₂O₃ HfN In₂O₃ Ni_xO_y Pt Ru SiN SiO₂ SnO₂ SrO Ta₂O₅ TiN Various Alumina Hafnia ITO Moly Oxide Titania Zirconia	Fiji 1 and 2 Training
Fiji 3 fiji3	SNF Cleanroom Paul G Allen L107	The Fiji3 ALD system from Cambridge Nanotech/Ultratech is a plasma...	SiO₂ Various Alumina Hafnia Titania	Fiji 3 Training
First Nano carbon nanotube CVD furnace cvd-nanotube	SNF Exfab Paul G Allen L119 Año Nuevo	CVD-Nanotube The First Nano CVD furnace is dedicated to carbon...	CNT	cvd-nanotube training
Fujifilm Dimatix Ink Jet Printer nanoinkjet	SNF Exfab Paul G Allen 155 Mavericks		PROM Approval Required for Materials	Dimatix Ink Jet Printer Training
Hummer V Sputter Coater hummer	SNF Exfab Paul G Allen L119 Año Nuevo	The Technics Hummer V is a manually controlled table top...		Hummer V Sputter Coater Training
Innotec Evaporator Innotec	SNF Cleanroom Paul G Allen L107	Innotec is an E-beam metal evaporation system, capable of depositing...	Ag Al Au Co Cr Cu Fe Ge In Ni Pd Si Ta Ti W Moly	Innotec Evaporator Training
Intlvac Evaporation Intlvac_evap	SNF Cleanroom Paul G Allen L107		Al Co Cr Ge Hf Nb Ni Pd Si Ta Ti V W Zr Moly	Intlvac Evaporation Training
KJL Evaporator KJL	SNSF Nanofabrication Spilker 006 Nanopatterning Cleanroom	We have a KJ Lesker e-gun/beam evaporator available in the...	Ag Al Au Cr Cu Ge Ni Pd Ti V Moly	KJL Training
Lesker Sputter lesker-sputter	SNF Exfab Paul G Allen 155A Venice	Lesker is a load locked single wafer metal sputter providing...	Ag Al AlSi Au Co Cr Cu Fe Nb Ni Pd Si SiO₂ Ta Ti TiN W Alumina ITO	Lesker Sputter Training
Lesker2 Sputter lesker2-sputter	SNF Cleanroom Paul G Allen L107	Lesker2 is a load locked single wafer metal sputter providing...	Ag Al AlSi Cr Ge Pd Ru Sc Si SiO₂ Sn Ta Ti TiN W Alumina ITO Moly	Lesker2 Sputter Training
Metalica Sputter metalica	SNF Cleanroom Paul G Allen L107	Metalica is a metal sputter that was built “in-house” to...	Ag Al Au Cr Cu NiCr Pd Pt Sn Ta Ti V W Moly Ti Tungsten	Metalica Sputter Training
MFS Large Evaporator MFS Large			Ag Al Au Cr Cu Fe Ge Ir MgF Nb Ni Pd SiO Ta Ti W Moly	MFS Large Training
MFS Small Evaporator MFS Small			Ag Al Au Cr Cu Fe Ge In Ni SiO Sn Ti	MFS Small Training