The "All" cleanliness group is part of the SNF/ExFab contamination policy.
The following is a list of equipment that fall into the "All" category.
Equipment name & Badger ID | Technique | Cleanliness | Material Thickness Range | Minimum Resolution | Exposure Wavelength | Mask Size | Max Exposure Area | Resist | Developer | Objective Separation | Process Temperature Range | Chemicals | Sample Size Limits | Resolution Notes | Substrate Size | Substrate Type | Maximum Load |
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110°C Oven oven110 |
All |
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110 ºC
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90°C Oven oven90 |
All |
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90 ºC
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ASML PAS 5500/60 i-line Stepper asml |
All |
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365 nm | 5 inch |
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EV Group Contact Aligner evalign |
All |
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350 - 450 nm | 5 inch, 7 inch | 5 inch mask = 4 inch, 7 inch mask = 6 inch |
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one piece or wafer | |||||||
EVG 101 Spray Coater evgspraycoat |
All |
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1 | ||||||||||
Flexus 2320 Stress Tester stresstest |
All |
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1 | ||||||||||
Headway 3 Manual Resist Spinner headway3 |
All |
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1 piece or wafer | |||||||||||
Headway Manual Resist Spinner headway2 |
All |
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one piece or wafer | ||||||||||
Heidelberg MLA 150 heidelberg |
All |
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405 nm |
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1 | |||||||||
Heidelberg MLA 150 - 2 heidelberg2 |
All |
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375 nm |
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1 | |||||||||
HMDS Vapor Prime Oven, YES yes |
All |
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150 ºC
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HMDS Vapor Prime Oven, YES2 yes2 |
All |
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150 ºC
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25 | |||||||||||
Karl Suss MA-6 Contact Aligner 1 karlsuss |
All |
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365 nm | 4 inch, 5 inch, 7 inch | 5 inch mask = 4 inch, 7 inch mask = 6 inch, 4 inch mask = 3 inch |
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Karl Suss MA-6 Contact Aligner 2 karlsuss2 |
All |
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365 nm or 405 nm | 4 inch, 5 inch, 7 inch | 5 inch mask = 4 inch, 7 inch mask = 6 inch, 4 inch mask = 3 inch |
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Keyence Digital Microscope VHX-6000 keyence |
All |
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Lakeshore Hall Measurement System LakeshoreHall |
All |
100 μm -
1000 μm
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-258 °C - 1000 °C
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8 in wafer |
Sensor Transducer Size is 14 mm diameter |
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1 piece | ||||||||
Laurell Manual Resist Spinner laurell-R |
All |
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LEI1500 Contactless Sheet Resistance Mapping eddycurrent |
All |
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8 in wafer |
Sensor Transducer Size is 14 mm diameter |
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1 wafer(2" to 8") | ||||||||
Mask Scrubber masksrub |
All |
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5 inch |
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micromanipulator6000 IV-CV probe station micromanipulator6000 |
All |
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1x4" wafer |