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Oxford III-V etcher Training

Lab Facility: 
SNF Cleanroom
Training Charges: 
1.50 hours
Primary Trainer: 
Lavendra Mandyam
Backup Trainer(s): 
Cliff Knollenberg
Primary Maintenance: 
Elmer Enriquez
Backup Maintenance: 
Mike Dickey

Steps to become a tool user

  1. Become a member of SNF.
  1. Check Training Calendar for any scheduled training
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  2. Contact the primary trainer:
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  3. Read the relevant operating procedures before your training session.
  4. Online training optional for background on plasma etching and choosing an etcher. Online training required. Open Online Course for general information about the online training. for general information about the Lagunita online training.
    Go to  Go to Online Nano Course Login to log in directly to the course. to login directly to the course. Go to "nano@stanford" and then to the "Dry Etching" Section for the three videos on plasma etching principles and go to the "Choosing a Dry Etching Process" section for guidelines for choosing the right equipment.
  5. Attend the training session to get qualified.

Equipment Covered by this Training

Oxford III-V etcher (Ox-35)