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Solvent Cleaning

Solvents are used to clean wafers that have materials exposed that are sensitive to the wet and dry resist strip techniques that use oxidation of the resist as the primary removal mechanism. Some common places where solvent cleans are used when there are exposed metals on the surface or when the substrate materials oxidize easily.

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Cleanliness Equipment name & Badger ID Location Image Overview Link to Training
Flexible Ex Fab Solvent Wet Bench
wbexfab_solv
SNF Exfab Paul G Allen 104 Stinson

Exfab solvent wet bench (wbexfab_solv, wbexfab_plug - badger names) is for wet chemical processing with solvents of standard and non-standard...Read more

WbExfab_Solv Training
Flexible Lithography Solvent Bench
lithosolv
SNF Cleanroom Paul G Allen L107

The lithosolv wet bench is used for handling solvents or other volatile organics such as photoresist. Processes performed here include...Read more

Lithography Solvent Bench Training
Flexible Wet Bench Flexible Solvents
wbflexsolv
SNF Cleanroom Paul G Allen L107

The Wet Bench Flexible Solvents is used for manual solvent cleaning of silicon wafers, tweezers, glassware, or any other inert...Read more

Wet Bench Flexible Solvents 1 and 2 Training
Flexible Wet Bench Flexible Solvents 1
wbflexsolv-1
SNF Cleanroom Paul G Allen L107
Wet Bench Flexible Solvents

The Solvent Wet Bench is used for manual solvent cleaning of silicon wafers, tweezers, glassware, or any other inert objects...Read more

Wet Bench Flexible Solvents 1 and 2 Training
Flexible Wet Bench Flexible Solvents 2
wbflexsolv-2
SNF Cleanroom Paul G Allen L107
Wet Bench Flexible Solvents

The Wet Bench Flexible Solvents is used for manual solvent cleaning of silicon wafers, tweezers, glassware, or any other inert...Read more

Wet Bench Flexible Solvents 1 and 2 Training