Solvent Cleaning

Solvents are used to clean wafers that have materials exposed that are sensitive to the wet and dry resist strip techniques that use oxidation of the resist as the primary removal mechanism. Some common places where solvent cleans are used when there are exposed metals on the surface or when the substrate materials oxidize easily.

Cleanliness	Equipment name & Badger ID	Location	Overview	Link to Training
Flexible	Ex Fab Solvent Wet Bench wbexfab_solv	SNF Exfab Paul G Allen 104 Stinson	Exfab solvent wet bench (wbexfab_solv, wbexfab_plug - badger names) is for wet chemical processing with solvents of standard and non-standard...Read more	WbExfab_Solv Training
Flexible	Lithography Solvent Bench lithosolv	SNF Cleanroom Paul G Allen L107	The lithosolv wet bench is used for handling solvents or other volatile organics such as photoresist. Processes performed here include...Read more	Lithography Solvent Bench Training
Flexible	Wet Bench Flexible Solvents wbflexsolv	SNF Cleanroom Paul G Allen L107	The Wet Bench Flexible Solvents is used for manual solvent cleaning of silicon wafers, tweezers, glassware, or any other inert...Read more	Wet Bench Flexible Solvents 1 and 2 Training
Flexible	Wet Bench Flexible Solvents 1 wbflexsolv-1	SNF Cleanroom Paul G Allen L107	The Solvent Wet Bench is used for manual solvent cleaning of silicon wafers, tweezers, glassware, or any other inert objects...Read more	Wet Bench Flexible Solvents 1 and 2 Training
Flexible	Wet Bench Flexible Solvents 2 wbflexsolv-2	SNF Cleanroom Paul G Allen L107	The Wet Bench Flexible Solvents is used for manual solvent cleaning of silicon wafers, tweezers, glassware, or any other inert...Read more	Wet Bench Flexible Solvents 1 and 2 Training

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Techniques

Solvent Cleaning