Solvent Cleaning
Solvents are used to clean wafers that have materials exposed that are sensitive to the wet and dry resist strip techniques that use oxidation of the resist as the primary removal mechanism. Some common places where solvent cleans are used when there are exposed metals on the surface or when the substrate materials oxidize easily.
| Cleanliness | Equipment name & Badger ID | Location | Image | Overview | Link to Training |
|---|---|---|---|---|---|
| Flexible |
Ex Fab Solvent Wet Bench wbexfab_solv |
SNF Exfab Paul G Allen 104 Stinson |
Exfab solvent wet bench (wbexfab_solv, wbexfab_plug - badger names) is for wet chemical processing with solvents of standard and non-standard...Read more |
WbExfab_Solv Training | |
| Flexible |
Lithography Solvent Bench lithosolv |
SNF Cleanroom Paul G Allen L107 |
 |
The lithosolv wet bench is used for handling solvents or other volatile organics such as photoresist. Processes performed here include...Read more |
Lithography Solvent Bench Training |
| Flexible |
Wet Bench Flexible Solvents wbflexsolv |
SNF Cleanroom Paul G Allen L107 |
 |
The Wet Bench Flexible Solvents is used for manual solvent cleaning of silicon wafers, tweezers, glassware, or any other inert...Read more |
Wet Bench Flexible Solvents 1 and 2 Training |
| Flexible |
Wet Bench Flexible Solvents 1 wbflexsolv-1 |
SNF Cleanroom Paul G Allen L107 |
 |
The Solvent Wet Bench is used for manual solvent cleaning of silicon wafers, tweezers, glassware, or any other inert objects...Read more |
Wet Bench Flexible Solvents 1 and 2 Training |
| Flexible |
Wet Bench Flexible Solvents 2 wbflexsolv-2 |
SNF Cleanroom Paul G Allen L107 |
 |
The Wet Bench Flexible Solvents is used for manual solvent cleaning of silicon wafers, tweezers, glassware, or any other inert...Read more |
Wet Bench Flexible Solvents 1 and 2 Training |
