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Evaporation

Evaporation is a common method of thin-film deposition. It involves two basic processes: a hot source material evaporates and condenses on the substrate.

Technique Tabs

Main Tab

Processing Techniques	Equipment name & Badger ID	Teaser Blurb	Cleanliness	Location
Evaporation	AJA Evaporator aja-evap		Flexible	SNF Exfab Paul G Allen 155A Venice
Evaporation	AJA2 Evaporator aja2-evap	This E-beam evaporator can evaporate a variety of semi-clean materials onto your substrates. It is equipped with an ion gun for precleaning samples.	Semiclean	SNF Cleanroom Paul G Allen L107
Evaporation	Innotec Evaporator Innotec		Flexible	SNF Cleanroom Paul G Allen L107
Evaporation	Intlvac Evaporator Intlvac_evap		Clean, Semiclean	SNF Cleanroom Paul G Allen L107

Detail Tab

Processing Technique	Equipment name & Badger ID	Cleanliness	Materials Lab Supplied	Material Thickness Range	Substrate Size	Maximum Load (number of wafers)	Notes
Evaporation	AJA Evaporator aja-evap	Flexible	Ag Al Au Co Cr Cu Fe Ge Hf Ni Ni_xO_y Pd Pt SiO₂ Ti Titania	0.00 - 300.00 nm	Pieces 2" 3" 4" 6"	4"x3 or 6"x1 wafers or pieces	For more than 300nm deposition, please contact Graham Ewing<grahamj.ewing@stanford.edu> in advance
Evaporation	AJA2 Evaporator aja2-evap	Semiclean	Ag Al Co Cr Ge Hf Nb Pd Pt Si Ta Ti V W Zr Moly	0.00 - 300.00 nm	Pieces 2" 3" 4" 6"	4"x3 or 6"x1 wafers or pieces	For more than 300nm deposition, please contact Graham Ewing<grahamj.ewing@stanford.edu> in advance
Evaporation	Innotec Evaporator Innotec	Flexible	Ag Al Au Co Cr Cu Fe Ge In Ni Pd Si Ta Ti W Moly		Pieces 2" 3" 4" 6"	22 four inch wafers	Precious metals limit is <200nm
Evaporation	Intlvac Evaporator Intlvac_evap	Clean, Semiclean	Al Co Cr Ge Hf Nb Ni Pd Si Ta Ti V W Zr Moly	0.00 - 0.50 μm	Pieces 2" 3" 4" 6"	12 4 inch wafers, 2 6 inch wafers