Skip to content Skip to navigation

Evaporation

Evaporation is a common method of thin-film deposition. It involves two basic processes: a hot source material evaporates and condenses on the substrate.

Equipment name & Badger ID	Location	Image	Overview	Materials Lab Supplied	Link to Training
AJA Evaporator aja-evap	SNF Exfab Paul G Allen 155A Venice		The AJA e-beam evaporator can be used to directionally deposit...	Ag Al Au Co Cr Cu Fe Ge Hf Ni Ni_xO_y Pd Pt SiO₂ Ti Alumina Titania	AJA Evaporation training
AJA2 Evaporator aja2-evap	SNF Cleanroom Paul G Allen L107		The AJA e-beam evaporator can be used to directionally deposit...	Ag Al Co Cr Ge Hf Nb Pd Pt Si Ta Ti V W Zr Moly	AJA2 Evaporator
Innotec Evaporator Innotec	SNF Cleanroom Paul G Allen L107		Innotec is an E-beam metal evaporation system, capable of depositing...	Ag Al Au Co Cr Cu Fe Ge In Ni Pd Si Ta Ti W Moly	Innotec Evaporator Training
Intlvac Evaporation Intlvac_evap	SNF Cleanroom Paul G Allen L107			Al Co Cr Ge Hf Nb Ni Pd Si Ta Ti V W Zr Moly	Intlvac Evaporation Training
KJL Evaporator KJL	SNSF Nanofabrication Spilker 006 Nanopatterning Cleanroom		We have a KJ Lesker e-gun/beam evaporator available in the...	Ag Al Au Cr Cu Ge Ni Pd Ti V Moly	KJL Training
MFS Large Evaporator MFS Large				Ag Al Au Cr Cu Fe Ge Ir MgF Nb Ni Pd SiO Ta Ti W Moly	MFS Large Training
MFS Small Evaporator MFS Small				Ag Al Au Cr Cu Fe Ge In Ni SiO Sn Ti	MFS Small Training

Project

Documentation

Develop Calibration Process for Innotec Tilt Angle Jig- Final Report
Procedure to deposit Gold only on the sidewalls of rectangular nanostructures and its applications- Final Report