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Evaporation

Evaporation is a common method of thin-film deposition. It involves two basic processes: a hot source material evaporates and condenses on the substrate.

Equipment name & Badger ID	Location	Image	Overview	Materials Lab Supplied	Link to Training
AJA Evaporator aja-evap	SNF Exfab Paul G Allen 155A Venice		The AJA e-beam evaporator can be used to directionally deposit...	Ag Al Au Co Cr Cu Fe Ge Hf Ni Ni_xO_y Pd Pt SiO₂ Ti Titania	AJA Evaporation training
AJA2 Evaporator aja2-evap	SNF Cleanroom Paul G Allen L107		The AJA e-beam evaporator can be used to directionally deposit...	Ag Al Co Cr Ge Hf Nb Pd Pt Si Ta Ti V W Zr Moly	AJA2 Evaporator
Innotec Evaporator Innotec	SNF Cleanroom Paul G Allen L107		Innotec is an E-beam metal evaporation system, capable of depositing...	Ag Al Au Co Cr Cu Fe Ge In Ni Pd Si Ta Ti W Moly	Innotec Evaporator Training
Intlvac Evaporation Intlvac_evap	SNF Cleanroom Paul G Allen L107			Al Co Cr Ge Hf Nb Ni Pd Si Ta Ti V W Zr Moly	Intlvac Evaporation Training

Project

Documentation

Develop Calibration Process for Innotec Tilt Angle Jig- Final Report
Procedure to deposit Gold only on the sidewalls of rectangular nanostructures and its applications- Final Report