Equipment Name | Cleanliness | Materials Lab Supplied | Material Thickness Range | Substrate Size | Maximum Load | Process Temperature Range | Gases | Cleaning Required | Notes |
---|---|---|---|---|---|---|---|---|---|
AMAT Centurion Epitaxial System (epi2) | Clean |
50.00 Å -
3.00 μm
|
1 |
600 °C - 1200 °C
|
Pre-Diffusion Clean |
N and P doping available- intrinsic to 5E19 Operating pressure range is 5-300Torr |