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Plasma Enhanced (PE) ALD

Plasma Enhanced ALD uses a down stream plasma system to deliver reactive plasma gases as a co-reactant to the metal-organic precursors. 

A couple of useful links that help navigate ALD research in general (not specific to the SNF) are:

  • www.plasma-ald.com: a website created by Dr. Mark Sowa that has a survey of plasma ALD literature
  • www.atomiclimits.com: a website created by Professor Erwin Kessels, Eindhoven University, that provides a dynamic discussion of the ALD landscape.
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