Plasma Enhanced ALD uses a down stream plasma system to deliver reactive plasma gases as a co-reactant to the metal-organic precursors.
A couple of useful links that help navigate ALD research in general (not specific to the SNF) are:
Equipment name & Badger ID | Location | Image | Overview | Materials Lab Supplied | Link to Training |
---|---|---|---|---|---|
Fiji 1 fiji1 |
SNF Cleanroom Paul G Allen L107 |
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Fiji1 is a load-locked, plasma-enabled atomic layer deposition (ALD) system.... |
Fiji 1 and 2 Training | |
Fiji 2 fiji2 |
SNF Cleanroom Paul G Allen L107 |
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Fiji2 is a load-locked, plasma-enabled atomic layer deposition (ALD) system.... |
Fiji 1 and 2 Training | |
Fiji 3 fiji3 |
SNF Cleanroom Paul G Allen L107 |
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The Fiji3 ALD system from Cambridge Nanotech/Ultratech is a plasma... |
Fiji 3 Training |