Plasma Enhanced (PE) ALD
Plasma Enhanced ALD uses a down stream plasma system to deliver reactive plasma gases as a co-reactant to the metal-organic precursors.
A couple of useful links that help navigate ALD research in general (not specific to the SNF) are:
- www.plasma-ald.com: a website created by Dr. Mark Sowa that has a survey of plasma ALD literature
- www.atomiclimits.com: a website created by Professor Erwin Kessels, Eindhoven University, that provides a dynamic discussion of the ALD landscape.
| Equipment name & Badger ID | Location | Image | Overview | Materials Lab Supplied | Link to Training |
|---|---|---|---|---|---|
|
Fiji 1 fiji1 |
SNF Cleanroom Paul G Allen L107 |
 |
Fiji1 is a load-locked, plasma-enabled atomic layer deposition (ALD) system.... |
Fiji 1 and 2 Training | |
|
Fiji 2 fiji2 |
SNF Cleanroom Paul G Allen L107 |
 |
Fiji2 is a load-locked, plasma-enabled atomic layer deposition (ALD) system.... |
Fiji 1 and 2 Training | |
|
Fiji 3 fiji3 |
SNF Cleanroom Paul G Allen L107 |
 |
The Fiji3 ALD system from Cambridge Nanotech/Ultratech is a plasma... |
Fiji 3 Training |
