Skip to content Skip to navigation

Heidelberg Training

Lab Facility: 
Training Charges: 
2.00 hours
Primary Trainer: 
Primary Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. "All Litho" class is required before training on any of the lithography tools. Please send an email to all-litho-training@lists.stanford.edu to sign up for the All Litho class. Read more here: All Litho class.
  2. Contact the primary trainer: Please send the following information - substrate size and type, types of resists, resist thickness(es), minimum feature size, substrate relief ((i.e., highest point – lowest point on substrate in the Z direction), Special situations - Whether you are planning to tape the substrate to another substrate etc
  3. Once you send me the information, read the materials and watched the videos, please shadow a user atleast 2 times. It is best to shadow a user who has similar substrate dimension as yours. After the first shadowing, please go through the reading material again. Please shadow twice. Once you have done the shadowing, please let me know. The next step would be tool training  session.
  4. Shadowing: Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the . We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You must a qualified user twice to be comfortable with the tool.
    Follow the instructions on this form: SNF Training Shadowing Form