Equipment name & Badger ID | Technique | Cleanliness | Primary Materials Etched | Other Materials Etched | Material Thickness Range | Materials Lab Supplied | Minimum Resolution | Exposure Wavelength | Mask Size | Max Exposure Area | Objective Separation | Process Temperature Range | Chemicals | Gases | Sample Size Limits | Resolution Notes | Substrate Size | Substrate Type | Maximum Load |
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AJA Evaporator aja-evap |
Flexible |
0 -
300 nm
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4"x3 or 6"x1 wafers or pieces | ||||||||||||
Fiji 2 ALD fiji2 |
Flexible |
1 Å -
50 nm
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24 °C - 350 °C
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Heidelberg MLA 150 heidelberg |
All |
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405 nm |
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1 | |||||||||||
Heidelberg MLA 150 - 2 heidelberg2 |
All |
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375 nm |
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1 | |||||||||||
Karl Suss MA-6 Contact Aligner 1 karlsuss |
All |
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365 nm | 4 inch, 5 inch, 7 inch | 5 inch mask = 4 inch, 7 inch mask = 6 inch, 4 inch mask = 3 inch |
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Karl Suss MA-6 Contact Aligner 2 karlsuss2 |
All |
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365 nm or 405 nm | 4 inch, 5 inch, 7 inch | 5 inch mask = 4 inch, 7 inch mask = 6 inch, 4 inch mask = 3 inch |
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LEI1500 Contactless Sheet Resistance Mapping eddycurrent |
All |
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8 in wafer |
Sensor Transducer Size is 14 mm diameter |
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1 wafer(2" to 8") | ||||||||||
Oven BlueM 200°C to 430°C bluem |
Flexible |
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0 °C - 430 °C
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PDS 2010 LABCOTER™ 2 Parylene Deposition System parcoater |
Flexible |
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Samco PC300 Plasma Etch System samco |
Flexible |
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20 ºC
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Four 4" wafers or two 6" wafers and one 8" wafer | ||||||||||||
Savannah ALD savannah |
Flexible |
1 Å -
50 nm
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24 °C - 250 °C
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Wet Bench Flexcorr 1 wbflexcorr-1 |
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Flexible |
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Wet Bench Flexcorr 2 wbflexcorr-2 |
Flexible |
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Wet Bench Flexcorr 3 wbflexcorr-3 |
Flexible |
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Wet Bench Flexible Solvents wbflexsolv |
Flexible |
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Wet Bench Flexible Solvents 1 wbflexsolv-1 |
Flexible |
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Wet Bench Flexible Solvents 2 wbflexsolv-2 |
Flexible |
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Woollam woollam |
All |
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1 |