Equipment name & Badger ID | Technique | Cleanliness | Primary Materials Etched | Other Materials Etched | Material Thickness Range | Materials Lab Supplied | Minimum Resolution | Developer | Objective Separation | Process Temperature Range | Chemicals | Gases | Sample Size Limits | Resolution Notes | Substrate Size | Substrate Type | Maximum Load |
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DISCO Wafer Saw DISCO wafersaw |
Flexible |
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1x4", 1x6" or 1x8" wafer, or pieces | ||||||||||
Ex Fab Develop Wet Bench wbexfab_dev |
Flexible |
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Ex Fab Solvent Wet Bench wbexfab_solv |
Flexible |
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Fiji 1 ALD fiji1 |
Semiclean |
1 Å -
50 nm
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24 °C - 350 °C
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Fiji 2 ALD fiji2 |
Flexible |
1 Å -
50 nm
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24 °C - 350 °C
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Fiji 3 ALD fiji3 |
Flexible |
1 Å -
50 nm
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24 °C - 350 °C
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, , |
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Flexus 2320 Stress Tester stresstest |
All |
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1 | ||||||||||
LEI1500 Contactless Sheet Resistance Mapping eddycurrent |
All |
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8 in wafer |
Sensor Transducer Size is 14 mm diameter |
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1 wafer(2" to 8") | ||||||||
MVD mvd |
Flexible |
1 Å -
50 nm
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24 °C - 150 °C
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PDS 2010 LABCOTER™ 2 Parylene Deposition System parcoater |
Flexible |
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Prometrix Resistivity Mapping System prometrix |
All |
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1 | ||||||||||
Samco PC300 Plasma Etch System samco |
Flexible |
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20 ºC
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Four 4" wafers or two 6" wafers and one 8" wafer | ||||||||||
Savannah ALD savannah |
Flexible |
1 Å -
50 nm
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24 °C - 250 °C
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Sensofar S-neox s-neox |
All |
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1 | ||||||||||
SPTS uetch vapor etch uetch |
All |
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1 | ||||||||||
Technics Asher technics |
Flexible |
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, , |
Four 4" wafers to pieces, one 6" or 8" wafer | ||||||||||
Tencor P2 Profilometer p2 |
Clean, Semiclean |
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1 | ||||||||||
Woollam woollam |
All |
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1 |