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Stanford Nanofabrication Facility
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1.0 General Policies
2.0 Getting Around
3.0 Safety for All
4.0 General Chemical Safety
5.0 Appendices
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Face shield cleaning using steamer
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Iron
Chemical Formula:
Fe
Equipment Tabs
Deposition Equipment
Equipment name or Badger ID
Partial words okay.
Deposition Equipment
Equipment name & Badger ID
Cleanliness
Location
Material Thickness Range
Approved Materials supplied by Lab
AJA Evaporator
aja-evap
Flexible
SNF Exfab Paul G Allen 155A Venice
0
-
300 nm
Ag
Al
Au
Co
Cr
Cu
Fe
Ge
Hf
Ni
Ni
x
O
y
Pd
Pt
SiO
2
Ti
TiO
2
Innotec Evaporator
Innotec
Flexible
SNF Cleanroom Paul G Allen L107
Ag
Al
Au
Co
Cr
Cu
Fe
Ge
In
Mo
Ni
Pd
Si
Ta
Ti
W
Lesker Sputter
lesker-sputter
Flexible
SNF Exfab Paul G Allen 155A Venice
Ag
Al
Al
2
O
3
AlSi
Au
Co
Cr
Cu
Fe
In
x
Sn
y
O
z
Nb
Ni
Pd
Si
SiO
2
Ta
Ti
TiN
W
