Equipment name & Badger ID | Training Required & Charges | Cleanliness | Location | Notes |
---|---|---|---|---|
ASML PAS 5500/60 i-line Stepper asml |
ASML PAS 5500/60 i-line Stepper Training | All | SNF Cleanroom Paul G Allen L107 |
5:1 reducing stepper |
EV Group Contact Aligner evalign |
EV Group Contact Aligner Training | All | SNF Cleanroom Paul G Allen L107 |
1:1 Contact Aligner. |
Karl Suss MA-6 Contact Aligner 1 karlsuss |
Karl Suss MA-6 Contact Aligner 1 and 2 Training | All | SNF Cleanroom Paul G Allen L107 |
1:1 Contact Aligner. |
Karl Suss MA-6 Contact Aligner 2 karlsuss2 |
Karl Suss MA-6 Contact Aligner 1 and 2 Training | All | SNF Cleanroom Paul G Allen L107 |
1:1 Contact Aligner. |
Mask Scrubber masksrub |
Mask Scrubber Training | All | SNF Cleanroom Paul G Allen L107 |
5 inch mask cleaning, water under pressure, no chemicals |
Equipment name & Badger ID | Technique | Cleanliness | Minimum Resolution | Exposure Wavelength | Mask Size | Max Exposure Area | Chemicals | Substrate Size | Substrate Type | Maximum Load |
---|---|---|---|---|---|---|---|---|---|---|
ASML PAS 5500/60 i-line Stepper asml |
All |
|
365 nm | 5 inch |
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EV Group Contact Aligner evalign |
All |
|
350 - 450 nm | 5 inch, 7 inch | 5 inch mask = 4 inch, 7 inch mask = 6 inch |
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one piece or wafer | |||
Karl Suss MA-6 Contact Aligner 1 karlsuss |
All |
|
365 nm | 4 inch, 5 inch, 7 inch | 5 inch mask = 4 inch, 7 inch mask = 6 inch, 4 inch mask = 3 inch |
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Karl Suss MA-6 Contact Aligner 2 karlsuss2 |
All |
|
365 nm or 405 nm | 4 inch, 5 inch, 7 inch | 5 inch mask = 4 inch, 7 inch mask = 6 inch, 4 inch mask = 3 inch |
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Mask Scrubber masksrub |
All | 5 inch |