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Silicon Nitride

Chemical Formula: 
SiN

Deposited Silicon Nitride  (commonally called "nitride')is used as an isulator in traditional semiconductors, a masking layer or a stuctural layer in some mechanical applications.

Link to Silicon Nitride Wet Etching Technique

Equipment Tabs

Deposition Equipment
Partial words okay.
Deposition Equipment
Equipment name & Badger ID Cleanliness Location Material Thickness Range Approved Materials supplied by Lab
Fiji 2
fiji2
SNF Cleanroom Paul G Allen L107
1 Å - 50 nm
ThermcoNitride
thermconitride1
SNF Cleanroom Paul G Allen L107
100 Å - 2 μm
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