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Germanium

Chemical Formula:

Ge

Equipment Tabs

Deposition Equipment

Deposition Equipment
Equipment name & Badger ID	Cleanliness	Location	Material Thickness Range	Approved Materials supplied by Lab
AJA Evaporator aja-evap	Flexible	SNF Exfab Paul G Allen 155A Venice	0 - 300 nm	Ag Al Al₂O₃ Au Co Cr Cu Fe Ge Hf Ni Ni_xO_y Pd Pt SiO₂ Ti TiO₂
AJA2 Evaporator aja2-evap	Semiclean	SNF Cleanroom Paul G Allen L107	0 - 300 nm	Ag Al Co Cr Ge Hf Mo Nb Pd Pt Si Ta Ti V W Zr
Epi2 epi2	Clean	SNF Cleanroom Paul G Allen L107	50 Å - 3 μm	Ge Si Si SiGe
Innotec Evaporator Innotec	Flexible	SNF Cleanroom Paul G Allen L107		Ag Al Au Co Cr Cu Fe Ge In Mo Ni Pd Si Ta Ti W
Intlvac Evaporation Intlvac_evap	Clean Semiclean	SNF Cleanroom Paul G Allen L107	0 - 1 μm	Al Co Cr Ge Hf Mo Nb Ni Pd Si Ta Ti V W Zr
KJL Evaporator KJL		SNSF Nanofabrication Spilker 006 Nanopatterning Cleanroom		Ag Al Au Cr Cu Ge Mo Ni Pd Ti V
Lesker Sputter lesker-sputter	Flexible	SNF Exfab Paul G Allen 155A Venice		Ag Al Al₂O₃ AlSi Au Co Cr Cu Fe In_xSn_yO_z Nb Ni Pd Si SiO₂ Ta Ti TiN W
Lesker2 Sputter lesker2-sputter	Semiclean	SNF Cleanroom Paul G Allen L107	1 μm	Ag Al Al₂O₃ AlSi Cr Ge In_xSn_yO_z Mo Pd Ru Sc Si SiO₂ Sn Ta Ti TiN W
MFS Large Evaporator MFS Large				Ag Al Au Cr Cu Fe Ge Ir MgF Mo Nb Ni Pd SiO Ta Ti W
MFS Small Evaporator MFS Small				Ag Al Au Cr Cu Fe Ge In Ni SiO Sn Ti
ThermcoPoly1 thermcopoly1	Clean	SNF Cleanroom Paul G Allen L107	100 Å - 3 μm	Ge Si Si SiGe
ThermcoPoly2 thermcopoly2	Flexible	SNF Cleanroom Paul G Allen L107	100 Å - 3 μm	Ge Si Si SiGe

Etch Equipment

Etch Equipment
Equipment name & Badger ID	Cleanliness	Location	Primary Materials Etched	Other Materials Etched
Lam Research TCP 9400 Poly Etcher lampoly	Clean Semiclean	SNF Cleanroom Paul G Allen L107	Si Poly Silicon	Ge SiGe
STS Deep RIE Etcher stsetch	Clean Semiclean	SNF Cleanroom Paul G Allen L107	Si	Ge SiGe
Xactix Xenon Difluoride Etcher xactix	All	SNF Cleanroom Paul G Allen L107	Ge Si SiGe

Projects