Decontamination, Metal Clean, Piranha Cleaning, Wet Resist Removal, Acid or Base Wet Etching, Aluminum and Titanium and Tungsten Wet Etching, Silicon Wet Etching, Silicon Oxide Wet Etching |
Wet Bench Flexcorr 1 wbflexcorr-1 |
Flexible |
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Manual wet etching of non-standard materials. Hot plate available. GaAs allowed in personal labware only.
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Silicon Oxide Wet Etching |
Wet Bench Clean_res-hf wbclean_res-hf |
Clean |
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Resist as mask allowed
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Decontamination, Metal Clean, Piranha Cleaning, Wet Resist Removal, Acid or Base Wet Etching, Aluminum and Titanium and Tungsten Wet Etching, Silicon Wet Etching, Silicon Oxide Wet Etching |
Wet Bench Flexcorr 1 wbflexcorr-1 |
Flexible |
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Manual wet etching of non-standard materials. Hot plate available. GaAs allowed in personal labware only.
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Decontamination, Metal Clean, Piranha Cleaning, Wet Resist Removal, Acid or Base Wet Etching, Aluminum and Titanium and Tungsten Wet Etching, Silicon Wet Etching, Silicon Oxide Wet Etching |
Wet Bench Flexcorr 1 wbflexcorr-1 |
Flexible |
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Manual wet etching of non-standard materials. Hot plate available. GaAs allowed in personal labware only.
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Acid or Base Wet Etching, Piranha Cleaning |
Wet Bench Flexcorr 2 wbflexcorr-2 |
Flexible |
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Manual wet etching of non-standard materials. 3 hot pots available. GaAs allowed in personal labware only
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Acid or Base Wet Etching, Piranha Cleaning |
Wet Bench Flexcorr 3 wbflexcorr-3 |
Flexible |
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Manual wet etching of non-standard materials. Hot Plate available. GaAs not allowed.
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Acid or Base Wet Etching, Piranha Cleaning |
Wet Bench Flexcorr 4 wbflexcorr-4 |
Flexible |
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Manual wet etching of non-standard materials. CTB. Labware for "clean" KOH or TMAH etching available. GaAs not allowed.
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Silicon Nitride Wet Etching |
Wet Bench Clean_res- hotphos wbclean_res-hotphos |
Clean |
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Resist should have been removed
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Decontamination, Metal Clean, Piranha Cleaning, Wet Resist Removal, Acid or Base Wet Etching, Aluminum and Titanium and Tungsten Wet Etching, Silicon Wet Etching, Silicon Oxide Wet Etching |
Wet Bench Flexcorr 1 wbflexcorr-1 |
Flexible |
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Manual wet etching of non-standard materials. Hot plate available. GaAs allowed in personal labware only.
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Aluminum and Titanium and Tungsten Wet Etching |
Wet Bench CMOS Metal (wbclean3) wbclean3 |
Semiclean |
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25 wafers |
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Al, Ti, or W wet etching or oxide etching
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Decontamination, Metal Clean, Piranha Cleaning, Wet Resist Removal, Acid or Base Wet Etching, Aluminum and Titanium and Tungsten Wet Etching, Silicon Wet Etching, Silicon Oxide Wet Etching |
Wet Bench Flexcorr 1 wbflexcorr-1 |
Flexible |
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Manual wet etching of non-standard materials. Hot plate available. GaAs allowed in personal labware only.
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Decontamination, Metal Clean, Piranha Cleaning, Wet Resist Removal, Acid or Base Wet Etching, Aluminum and Titanium and Tungsten Wet Etching, Silicon Wet Etching, Silicon Oxide Wet Etching |
Wet Bench Flexcorr 1 wbflexcorr-1 |
Flexible |
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Manual wet etching of non-standard materials. Hot plate available. GaAs allowed in personal labware only.
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Acid or Base Wet Etching, Piranha Cleaning |
Wet Bench Flexcorr 2 wbflexcorr-2 |
Flexible |
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Manual wet etching of non-standard materials. 3 hot pots available. GaAs allowed in personal labware only
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Acid or Base Wet Etching, Piranha Cleaning |
Wet Bench Flexcorr 3 wbflexcorr-3 |
Flexible |
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Manual wet etching of non-standard materials. Hot Plate available. GaAs not allowed.
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Acid or Base Wet Etching, Piranha Cleaning |
Wet Bench Flexcorr 4 wbflexcorr-4 |
Flexible |
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Manual wet etching of non-standard materials. CTB. Labware for "clean" KOH or TMAH etching available. GaAs not allowed.
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Decontamination, Metal Clean, Piranha Cleaning, Wet Resist Removal, Acid or Base Wet Etching, Aluminum and Titanium and Tungsten Wet Etching, Silicon Wet Etching, Silicon Oxide Wet Etching |
Wet Bench Flexcorr 1 wbflexcorr-1 |
Flexible |
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Manual wet etching of non-standard materials. Hot plate available. GaAs allowed in personal labware only.
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Decontamination, Metal Clean, Piranha Cleaning, Wet Resist Removal, Acid or Base Wet Etching, Aluminum and Titanium and Tungsten Wet Etching, Silicon Wet Etching, Silicon Oxide Wet Etching |
Wet Bench Flexcorr 1 wbflexcorr-1 |
Flexible |
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Manual wet etching of non-standard materials. Hot plate available. GaAs allowed in personal labware only.
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