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Wet Etching

Wet etching refers to processes that use liquid chemicals to remove materials from samples. Important considerations for wet etching processes are the isotropic nature of the etch and it's impact to your desired pattern, the selectivity (ratio of etch rates between materials you want to remove and other materials that will be exposed to the etchant), and chemical safety. When selecting which equipment to use, you will need to consider the type of chemical, the size and shape of your sample, and the Cleanliness (formerly known as Contamination) group. 

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Equipment name & Badger ID Location Image Overview Primary Materials Etched Link to Training
Wet Bench Clean_res- hotphos
wbclean_res-hotphos
SNF Cleanroom Paul G Allen L107

The wbclean_res-hotphos is part of the Wet Bench Clean_-res-piranha-hf-hotphos. This bench (semi-automated) is part of...Read more

Wet Bench Clean Piranha/HF/Phosphoric Training
Wet Bench Clean_res-hf
wbclean_res-hf
SNF Cleanroom Paul G Allen L107

The wbclean-res-hf is part of the Wet Bench Clean_res-piranha,-hf, and -hotphos bench. This bench (semi-automated)...Read more

Wet Bench Clean Piranha/HF/Phosphoric Training
Wet Bench CMOS Metal (wbclean3)
wbclean3
SNF Cleanroom Paul G Allen L107

This part of the bench (right side) is the Wet Bench CMOS Metal (wbclean3).  It...Read more

Wet Bench CMOS Metal (wbclean3) Training
Wet Bench Flexcorr 1
wbflexcorr-1
SNF Cleanroom Paul G Allen L107

The Wet Bench Flexcorr1, part of the Wet Bench 1and2, is a manual wet chemical...Read more

Wet Bench Flexcorr 1and2 and 3and4 Training
Wet Bench Flexcorr 2
wbflexcorr-2
SNF Cleanroom Paul G Allen L107

Wet Bench flexcorr-2 , part of Wet Bench wbflexcorr-1 and -2, is for wet chemical...Read more

Wet Bench Flexcorr 1and2 and 3and4 Training
Wet Bench Flexcorr 3
wbflexcorr-3
SNF Cleanroom Paul G Allen L107

This wet bench is used for wet chemical (corrosives) processing of standard and non-standard (flexible)...Read more

Wet Bench Flexcorr 1and2 and 3and4 Training
Wet Bench Flexcorr 4
wbflexcorr-4
SNF Cleanroom Paul G Allen L107
Wet Bench Flexcorr 1and2 and 3and4 Training

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