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Stanford Nanofabrication Facility
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. ANY shadowing must be coordinated with SNF staff first.
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Zinc Oxide
Chemical Formula:
ZnO
3
Equipment Tabs
Deposition Equipment
Equipment name or Badger ID
Partial words okay.
Deposition Equipment
Equipment name & Badger ID
Cleanliness
Location
Material Thickness Range
Approved Materials supplied by Lab
Lesker Sputter
lesker-sputter
Flexible
SNF Exfab Paul G Allen 155A Venice
Ag
Al
Al
2
O
3
AlSi
Au
Co
Cr
Cu
Fe
In
x
Sn
y
O
z
Nb
Ni
Pd
Si
SiO
2
Ta
Ti
TiN
W
Savannah
savannah
Flexible
SNF Cleanroom Paul G Allen L107
1 Å
-
50 nm
Metal oxides
Al
2
O
3
Al
x
Zn
y
O
x
Ga
2
O
3
HfO
2
SnO
2
TiO
2
Various Dielectrics
ZnO
3
ZrO
2
Etch Equipment
Equipment name or Badger ID
Partial words okay.
No equipment matches all of the filter criteria you have set above.
Projects
Atomic Layer Deposition of Zinc Oxide- Final Report
-- (Report)
Atomic Layer Deposition of Zinc Oxide- Final Presentation
-- (Presentation)
Atomic Layer Deposition of Aluminum Doped Zinc Oxide
