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Preferred Short Name:
Resist
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Location
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Other Materials Etched
AMAT P5000 Etcher
p5000etch
Clean
Clean (Ge)
Semiclean
SNF Cleanroom Paul G Allen L107
Si based materials
Si
SiGe
SiN
SiO
2
SiON
Poly Silicon
C
C
C
dimethylpolysiloxane
poly(p-xylylene)
SiC
Ti
Various C-based
W
WSi
2
PI
Resist
Ti Tungsten
Gasonics Aura Asher
gasonics
Clean
Semiclean
SNF Cleanroom Paul G Allen L107
Resist
PI
Matrix Plasma Resist Strip
matrix
Flexible
SNF Cleanroom Paul G Allen L107
Resist
PI
Plasmaetch PE-50
plasma-etch
Flexible
SNF Exfab Paul G Allen 155 Mavericks
Resist
Samco PC300 Plasma Etch System
samco
Flexible
SNF Cleanroom Paul G Allen L107
Resist
Si based materials
dimethylpolysiloxane
Si
SiN
SiO
2
SiON
Various polymers
PI
Poly Silicon
Technics Asher
technics
Flexible
SNF Cleanroom Paul G Allen L107
Resist
dimethylpolysiloxane
poly(p-xylylene)
PI
Wet Bench Flexcorr 1
wbflexcorr-1
Flexible
SNF Cleanroom Paul G Allen L107
Metals
Al
Au
Cr
Si
SiO
2
Resist
GaAs
SiN
Ti
W
Projects
A Study of Analytical and Empirical Resist Reflow in the Literature
-- (Nano Nugget)
Microfluidic Device Fabrication Protocol and Troubleshooting Guide in the Stanford Flexible Cleanroom