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Aluminum Oxide

Preferred Short Name: 
Alumina
Chemical Formula: 
Al2O3

Al2O3 is commonly used as an electrical insulator.

Equipment Tabs

Deposition Equipment
Partial words okay.
Deposition Equipment
Equipment name & Badger ID Cleanliness Location Material Thickness Range Approved Materials supplied by Lab
Fiji 1
fiji1
SNF Cleanroom Paul G Allen L107
1 Å - 50 nm
Fiji 2
fiji2
SNF Cleanroom Paul G Allen L107
1 Å - 50 nm
Fiji 3
fiji3
SNF Cleanroom Paul G Allen L107
1 Å - 50 nm
Lesker Sputter
lesker-sputter
SNF Exfab Paul G Allen 155A Venice
Lesker2 Sputter
lesker2-sputter
SNF Cleanroom Paul G Allen L107
1 μm
MVD
mvd
SNF Cleanroom Paul G Allen L107
1 Å - 50 nm
Savannah
savannah
SNF Cleanroom Paul G Allen L107
1 Å - 50 nm
Projects
SOP for Thin, low temperature ALD of Al2O3 and HfO2 with seed layer -- (Nano Nugget)
ALD Dielectric Electrical Characterization- Final Report -- (Report)
High-k/SiO2 Interface Charge Characterization for ALD Tools- Final Report -- (Report)
MOSCAP Characterization of SNF ALD- Final Presentation -- (Presentation)
ALD Process for Top-Gating 2D Materials
Low temperature ALD-Grown Superconducting Tunnel Contacts
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