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Stanford Nanofabrication Facility
SNF is open under
New Normal Rules
. ANY shadowing must be coordinated with SNF staff first.
Stanford Nanofabrication Facility
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Join
Overview
Getting Started in the SNF labs
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Overview
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General Contacts
Staff List
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How to Join
Forms
Discussion Lists
Storage
Gary Sosa
Contact Information
Phone:
(650)725-1685
Office:
Paul G. Allen 144
Email:
Contact person by email
Contact Gary Sosa by email
About
Lab Organization(s):
SNF
Role:
Maintenance Engineer - Litho
Lithography Area/Wet Benches/Characterization
Trainer for
Oriel Deep UV Exposure Lamp (oriel-duv)
Maintainer for
ASML PAS 5500/60 i-line Stepper (asml)
CytoViva HSI (cytoviva)
Ebeam Process Wet Bench (wbebres)
EVG 101 Spray Coater (evgspraycoat)
Ex Fab Develop Wet Bench (wbexfab_dev)
Ex Fab Solvent Wet Bench (wbexfab_solv)
Flexus 2320 Stress Tester (stresstest)
Headway 3 Manual Resist Spinner (headway3)
HMDS Vapor Prime Oven, YES2 (yes2)
Hummer V Sputter Coater (hummer)
Karl Suss MA-6 Contact Aligner 1 (karlsuss)
Karl Suss MA-6 Contact Aligner 2 (karlsuss2)
Micro Mist Coater PDR-04 (micromist-coater)
Nanospec 210XP (nanospec2)
Nanospec 3 (nanospec3)
Oriel Deep UV Exposure Lamp (oriel-duv)
Prometrix Resistivity Mapping System (prometrix)
Reflectance Spectrometer Filmetrics F40 (filmetrics)
Sensofar S-neox (s-neox)
SVG Develop Track 1 (svgdev)
SVG Develop Track 2 (svgdev2)
SVG Resist Coat Track 1 (svgcoat)
SVG Resist Coat Track 2 (svgcoat2)
Tencor P2 Profilometer (p2)
Woollam (woollam)
Backup maintenance for
110°C Oven (oven110)
90°C Oven (oven90)
Alphastep 500 Profilometer (alphastep)
Blue M Oven (bluem)
DISCO Wafer Saw (DISCO wafersaw)
EV Group Contact Aligner (evalign)
EV Group Wafer Bonder (evbond)
Headway Manual Resist Spinner (headway2)
HMDS Vapor Prime Oven, YES (yes)
Karl Suss Wafer Bonder (ksbonder)
Laurell Manual Resist Spinner (laurell-R)
Lithography Solvent Bench (lithosolv)
Mask Scrubber (masksrub)
Optomec Printer (optomec-printer)
Ultraviolet Photoresist Cure (uvcure)
Wet Bench Clean 1 (wbclean-1)
Wet Bench Clean 2 (wbclean-2)
Wet Bench Clean_res- hotphos (wbclean_res-hotphos)
Wet Bench Clean_res-hf (wbclean_res-hf)
Wet Bench Clean_res-piranha (wbclean_res-piranha)
Wet Bench CMOS Metal (wbclean3) (wbclean3)
Wet Bench Decontamination (wbdecon)
Wet Bench Flexcorr 1 (wbflexcorr-1)
Wet Bench Flexcorr 2 (wbflexcorr-2)
Wet Bench Flexcorr 3 (wbflexcorr-3)
Wet Bench Flexcorr 4 (wbflexcorr-4)
Wet Bench Flexible Solvents (wbflexsolv)
Wet Bench Flexible Solvents 1 (wbflexsolv-1)
Wet Bench Flexible Solvents 2 (wbflexsolv-2)
Wet Bench Germanium (wbgen2)
Wet Bench Miscellaneous (wbmiscres)
Wet Bench Resist Strip (wbresstrip-1)
White Oven (white-oven)
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