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Gary Sosa

Contact Information

Phone:

(650)725-1685

Office:

Paul G. Allen 144

Contact Gary Sosa by email

About

Lab Organization(s):

SNF

Role:

Maintenance Engineer - Litho

Lithography Area/Wet Benches/Characterization

Trainer for

Oriel Deep UV Exposure Lamp (oriel-duv)

Maintainer for

ASML PAS 5500/60 i-line Stepper (asml)

CytoViva HSI (cytoviva)

Ebeam Process Wet Bench (wbebres)

EVG 101 Spray Coater (evgspraycoat)

Ex Fab Develop Wet Bench (wbexfab_dev)

Ex Fab Solvent Wet Bench (wbexfab_solv)

Flexus 2320 Stress Tester (stresstest)

Headway 3 Manual Resist Spinner (headway3)

HMDS Vapor Prime Oven, YES2 (yes2)

Hummer V Sputter Coater (hummer)

Karl Suss MA-6 Contact Aligner 1 (karlsuss)

Karl Suss MA-6 Contact Aligner 2 (karlsuss2)

Micro Mist Coater PDR-04 (micromist-coater)

Nanospec 210XP (nanospec2)

Nanospec 3 (nanospec3)

Oriel Deep UV Exposure Lamp (oriel-duv)

Prometrix Resistivity Mapping System (prometrix)

Reflectance Spectrometer Filmetrics F40 (filmetrics)

Sensofar S-neox (s-neox)

SVG Develop Track 1 (svgdev)

SVG Develop Track 2 (svgdev2)

SVG Resist Coat Track 1 (svgcoat)

SVG Resist Coat Track 2 (svgcoat2)

Tencor P2 Profilometer (p2)

Woollam (woollam)

Backup maintenance for

110°C Oven (oven110)

90°C Oven (oven90)

Alphastep 500 Profilometer (alphastep)

Blue M Oven (bluem)

Digital Instruments AFM Nanoscope Dimension 3000 (afm2)

DISCO Wafer Saw (DISCO wafersaw)

EV Group Contact Aligner (evalign)

EV Group Wafer Bonder (evbond)

Headway Manual Resist Spinner (headway2)

HMDS Vapor Prime Oven, YES (yes)

Karl Suss Wafer Bonder (ksbonder)

Laurell Manual Resist Spinner (laurell-R)

Lithography Solvent Bench (lithosolv)

Mask Scrubber (masksrub)

Optomec Printer (optomec-printer)

Ultraviolet Photoresist Cure (uvcure)

Wet Bench Clean 1 (wbclean-1)

Wet Bench Clean 2 (wbclean-2)

Wet Bench Clean_res- hotphos (wbclean_res-hotphos)

Wet Bench Clean_res-hf (wbclean_res-hf)

Wet Bench Clean_res-piranha (wbclean_res-piranha)

Wet Bench CMOS Metal (wbclean3) (wbclean3)

Wet Bench Decontamination (wbdecon)

Wet Bench Flexcorr 1 (wbflexcorr-1)

Wet Bench Flexcorr 2 (wbflexcorr-2)

Wet Bench Flexcorr 3 (wbflexcorr-3)

Wet Bench Flexcorr 4 (wbflexcorr-4)

Wet Bench Flexible Solvents (wbflexsolv)

Wet Bench Flexible Solvents 1 (wbflexsolv-1)

Wet Bench Flexible Solvents 2 (wbflexsolv-2)

Wet Bench Germanium (wbgen2)

Wet Bench Miscellaneous (wbmiscres)

White Oven (white-oven)

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