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Wet Bench Clean_res- hotphos (wbclean_res-hotphos)


The wbclean_res-hotphos is part of the Wet Bench Clean_-res-piranha-hf-hotphos. This bench (semi-automated) is part of the Clean Equipment Group for 3", 4", and 6" Si, SiGe, and quartz substrates and can only be used for wet silicon nitride etching. Wafers may not contain or have ever contained any metals, nor been exposed to equipment which may pose this contamination risk. This part of the bench contains one hot pot for phosphoric acid and one automatic dump rinser.


Processing Technique(s)

Capabilities and Specifications

Process Temperature Range: 

Resist should have been removed

Lab Facility, Location, and Badger Information

Badger Area: 
Badger ID: 

Training and Maintenance

Lab Facility: 
Training Charges: 
2.25 hours
Primary Trainer: 
Backup Trainer(s): 
Primary Maintenance: 
Backup Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. Read the relevant operating procedures:
  2. Shadowing: Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the . We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool.
    Print the SNF Training Shadowing Form and the Wet Bench Checklist on clean room paper.
  3. Sign up for the relevant training scheduled in .
  4. Contact the primary trainer: .

covered in wbclean-1 and-2

Operating Instructions