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Wet Bench Decontamination (wbdecon)

Overview

This part of the bench (left side), wbdecon, has one HCl bath, dump rinser, and SRD for the decontamination of 3", 4" or 6 " KOH-etched silicon wafers before being allowed back into the clean equipment group.

Cleanliness: 
Clean

Processing Technique(s)

Capabilities and Specifications

Process Temperature Range: 
Notes: 

KOH or wafersaw or post-cmp decontamination

Lab Facility, Location, and Badger Information

Lab Organization: 
Stanford Nanofabrication Facility Cleanroom (SNF Cleanroom)
Location: 
SNF Cleanroom Paul G Allen L107
Badger Area: 
SNF: Wet Benches
Badger ID: 
wbdecon

Training and Maintenance

Lab Facility: 
SNF Cleanroom
Primary Trainer: 
Uli Thumser
Primary Maintenance: 
Jim Haydon
Backup Maintenance: 
Gary Sosa

Steps to become a tool user

  1. Become a member of SNF.
  1. Read the relevant operating procedures:
  2. Please read the 'KOH decontamination at wbdecon' part of this page.
  3. Shadowing: Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the Discussion Lists. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool.
    Print the SNF Training Shadowing Form on clean room paper.
  4. Contact the primary trainer:
    .

Operating Instructions

Wet Bench Decontamination