HMDS Vapor Prime Oven, YES (yes)
The YES prime oven dehydrates the wafers at 150ºC and primes the wafers using HMDS (Hexamethyldisilazane) allowing better coverage and adhesion between oxides and resists.
Capabilities and Specifications
Process Temperature Range:
Two programs: Singe and HMDS prime or Singe only. No Resist allowed!
Lab Facility, Location, and Badger Information
Training and Maintenance
Steps to become a tool user
Sign up for the relevant training scheduled in
Read the relevant operating procedures:
Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the Discussion Lists
. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool.
Print the SNF Training Shadowing Form
on clean room paper.