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Wet Bench Flexible Solvents 1 (wbflexsolv-1)

Overview

Wet Bench Flexible Solvents

The Solvent Wet Bench is used for manual solvent cleaning of silicon wafers, tweezers, glassware, or any other inert objects such as equipment parts. The bench is equipped with a carboy to collect solvent waste , two ultrasonic baths, one hot plate for heating solvents in beakers, and a N2 gun for drying.

Cleanliness: 
Flexible

Processing Technique(s)

Capabilities and Specifications

Process Temperature Range: 
Notes: 

Manual solvent cleaning, two ultrasonic baths.

Lab Facility, Location, and Badger Information

Lab Organization: 
Stanford Nanofabrication Facility Cleanroom (SNF Cleanroom)
Location: 
SNF Cleanroom Paul G Allen L107
Badger Area: 
SNF: Wet Benches
Badger ID: 
wbflexsolv-1

Training and Maintenance

Lab Facility: 
SNF Cleanroom
Training Charges: 
0.50 hours
Primary Trainer: 
Uli Thumser
Backup Trainer(s): 
Mary Tang
Primary Maintenance: 
Jim Haydon
Backup Maintenance: 
Gary Sosa
Mario Vilanova

Steps to become a tool user

  1. Become a member of SNF.
  1. Read the relevant operating procedures:
  2. Shadowing: Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the Discussion Lists. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool.
    Print the SNF Training Shadowing Form on clean room paper.
  3. Sign up for the relevant training scheduled in
    .
  4. Contact the primary trainer:
    .

Operating Instructions

Wet Bench Flexible Solvents