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Mask Scrubber (masksrub)


Manual mask cleaner for one 5 inch mask, water under pressure.


Processing Technique(s)

Capabilities and Specifications

Lithography Specifications

Mask Size: 

5 inch mask cleaning, water under pressure, no chemicals

Lab Organization, Location, and Badger Information

Badger Area: 
SNF: Photolithography
Badger ID: 

Training and Maintenance

Lab Facility: 
Primary Trainer: 
Backup Trainer(s): 
Primary Maintenance: 
Backup Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. "All Litho" class is required before training on any of the lithography tools. Please send an email to to sign up for the All Litho class. Read more here: All Litho class.
  2. Contact the primary trainer: Uli Thumser