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Mask Scrubber (masksrub)

Overview

Manual mask cleaner for 5 inch masks, water under pressure.
Cleanliness: 

Capabilities and Specifications

Lithography Specifications

Mask Size: 
Process Temperature Range: 
Notes: 

5 inch mask cleaning, water under pressure, no chemicals

Lab Facility, Location, and Badger Information

Training and Maintenance

Lab Facility: 
Primary Trainer: 
Backup Trainer(s): 
Primary Maintenance: 
Backup Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. "All Litho" class is required before training on any of the lithography tools. Please send an email to all-litho-training@lists.stanford.edu to sign up for the All Litho class. Read more here: All Litho class.
  2. Sign up for the relevant training scheduled in .
  3. Contact the primary trainer: .