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Nanospec 3 (nanospec3)

New Normal Changes

New location! Now on table opposite the wbclean in the white light area. It replaced the nanospec1.


The Nanometrics Nanospec system uses non-contact, spectro-reflectometry (measurement of the intensity of reflective light as a function of incident wavelength) to determine the thickness of transparent films (up to two) on substrates, such as silicon, that are reflective in the visible range. Wavelength range is from 300nm-900nm.


Processing Technique(s)

Capabilities and Specifications

Process Temperature Range: 

Lab Facility, Location, and Badger Information

Training and Maintenance

Lab Facility: 
Primary Trainer: 
Backup Trainer(s): 
Primary Maintenance: 
Backup Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. Contact the primary trainer: .