Nanospec 3 (nanospec3)
Overview
The Nanometrics Nanospec system uses non-contact, spectro-reflectometry (measurement of the intensity of reflective light as a function of incident wavelength) to determine the thickness of transparent films (up to two) on substrates, such as silicon, that are reflective in the visible range. Wavelength range is from 300nm-900nm.
Cleanliness:
Processing Technique(s)
Capabilities and Specifications
Substrate Sizes
Lab Organization, Location, and NEMO Information
Lab Organization:
Location:
NEMO Area:
nSiL: Cleanroom
NEMO ID:
nanospec3
Training and Maintenance
Lab Facility:
Primary Trainer:
Backup Trainer(s):
Primary Maintenance:
Backup Maintenance:
Steps to become a tool user
-
Become a member of SNF.
- Contact the primary trainer: Cliff Knollenberg
