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Prometrix Resistivity Mapping System (prometrix)

New Normal Changes

This is a small room, so by default, occupancy limits remain to allow 6' distancing for those who wish. So unless arrangements are made, reserve the Prometrix and verify the Woollam or S-neox are not occupied at the same time.

Overview

The Prometrix OmniMap Model RS35e Resistivity Mapping System collects and analyzes sheet resistance data on various conductive layers such as implants, diffusions, epi, metals and bulk substrates. The system provides accurate and repeatable sheet resistance measurements from 5 m ohm/sq to 5 M ohm/sq on 2-inch ( 50mm) to 8-inch (200mm) wafers. The OmniMap measures up to 1264 sites per wafer using standard or user-defined patterns.

Cleanliness: 

Capabilities and Specifications

Process Temperature Range: 
Maximum Load: 
1
Notes: 

3 Probe Heads for different Cleanliness

Lab Facility, Location, and Badger Information

Training and Maintenance

Lab Facility: 
Training Charges: 
0.50 hours
Primary Trainer: 
Backup Trainer(s): 
Primary Maintenance: 
Backup Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. Read the relevant operating procedures:
  2. Shadowing: Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the Discussion Lists. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool.
    Print the SNF Training Shadowing Form on clean room paper.
  3. Sign up for the relevant training scheduled in .
  4. Contact the primary trainer: .

Operating Instructions