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SVG Resist Coat Track 1 (svgcoat)

Overview

The SVG (Silicon Valley Group) coater is an automated track system for dispensing photoresist on 4" silicon, glass, or quartz wafers. The system includes two stations: a prime oven which bakes the wafer and dispenses the adhesion promoter, HMDS; and a combination spinner, which dispenses photoresist, and pre-bake oven which cures the resist. HMDS is only available at track 2. The uniformity of spun photoresists are typically +/- 100 Å.

Cleanliness: 
All

Processing Technique(s)

Capabilities and Specifications

Lithography Specifications

Resist: 
Shipley 3612 resist
SPR220-3 resist
SPR220-7
Process Temperature Range: 
Maximum Load: 
25 4 inch wafers
Notes: 

Automatic Resist spinning and bake

Lab Facility, Location, and Badger Information

Lab Organization: 
Stanford Nanofabrication Facility Cleanroom (SNF Cleanroom)
Location: 
SNF Cleanroom Paul G Allen L107
Badger Area: 
SNF: Photolithography
Badger ID: 
svgcoat

Training and Maintenance

Lab Facility: 
SNF Cleanroom
Training Charges: 
1.25 hours
Primary Trainer: 
Uli Thumser
Backup Trainer(s): 
Cliff Knollenberg
Primary Maintenance: 
Gary Sosa
Backup Maintenance: 
Mario Vilanova

Steps to become a tool user

  1. Become a member of SNF.
  1. "All Litho" class is required before training on any of the lithography tools. Please send an email to all-litho-training@lists.stanford.edu to sign up for the All Litho class. Read more here: All Litho class.
  2. View the SVG coater movie.
  3. Read the relevant operating procedures:
  4. Shadowing: Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the Discussion Lists. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool.
    Follow the instructions on this form: SNF Training Shadowing Form and this checklist: SVG Resist Coat Tracks 1 and 2 Checklist
  5. Sign up for the relevant training scheduled in
    .
  6. Contact the primary trainer:
    .

Operating Instructions

SVG Resist Coat Tracks 1 and 2