SVG Resist Coat Track 1 (svgcoat)
Overview
The SVG (Silicon Valley Group) coater is an automated track system for dispensing photoresist on 4" silicon, glass, or quartz wafers. The system includes two stations: a prime oven which bakes the wafer and dispenses the adhesion promoter, HMDS; and a combination spinner, which dispenses photoresist, and pre-bake oven which cures the resist. HMDS is only available at track 2. The uniformity of spun photoresists are typically +/- 100 Å.
Cleanliness:
Processing Technique(s)
Capabilities and Specifications
Lithography Specifications
Process Temperature Range:
Substrate Type
Substrate Sizes
Maximum Load:
25 4 inch wafers
Notes:
Automatic Resist spinning and bake
Lab Facility, Location, and Badger Information
Lab Organization:
Location:
Badger Area:
Badger ID:
svgcoat
Training and Maintenance
Lab Facility:
Training Charges:
1.25 hours
Primary Trainer:
Backup Trainer(s):
Primary Maintenance:
Backup Maintenance:
Steps to become a tool user
-
Become a member of SNF.
- "All Litho" class is required before training on any of the lithography tools. Please send an email to all-litho-training@lists.stanford.edu to sign up for the All Litho class. Read more here: All Litho class.
- View the SVG coater movie.
- Read the relevant operating procedures:
- Shadowing: Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the . We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool.
Follow the instructions on this form: SNF Training Shadowing Form and this checklist: SVG Resist Coat Tracks 1 and 2 Checklist - Sign up for the relevant training scheduled in .
- Contact the primary trainer: .
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