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Ultraviolet Photoresist Cure (uvcure)

Overview

primary wavelength: 254 nm

Cleanliness: 

Processing Technique(s)

Capabilities and Specifications

Lithography Specifications

Exposure Wavelength: 
254 nm
Process Temperature Range: 

Lab Facility, Location, and Badger Information

Training and Maintenance

Lab Facility: 
Primary Trainer: 
Primary Maintenance: 
Backup Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. "All Litho" class is required before training on any of the lithography tools. Please send an email to all-litho-training@lists.stanford.edu to sign up for the All Litho class. Read more here: All Litho class.
  2. Contact the primary trainer: .