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HMDS Vapor Prime Oven, YES2 (yes2)

Cleanliness: 
All

Processing Technique(s)

Capabilities and Specifications

Lithography Specifications

Developer: 
HMDS
Process Temperature Range: 
150 ºC
Maximum Load: 
25
Notes: 

Singe and prime. No Resist allowed!

Lab Facility, Location, and Badger Information

Lab Organization: 
(SNF Exfab)
Location: 
SNF Exfab Paul G Allen 104 Stinson
Badger Area: 
nSiL: L104 Stinson
Badger ID: 
yes2

Training and Maintenance

Lab Facility: 
SNF Exfab
Training Charges: 
0.00 hours
Primary Trainer: 
Swaroop Kommera
Backup Trainer(s): 
Cliff Knollenberg
Uli Thumser
Primary Maintenance: 
Gary Sosa
Backup Maintenance: 
Mario Vilanova

Steps to become a tool user

  1. Become a member of SNF.
  1. "All Litho" class is required before training on any of the lithography tools. Please send an email to all-litho-training@lists.stanford.edu to sign up for the All Litho class. Read more here: All Litho class.
  2. Sign up for the "All Litho" training scheduled in
    .
  3. Contact the primary trainer:
    .