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HMDS Vapor Prime Oven, YES2 (yes2)


Capabilities and Specifications

Lithography Specifications

Process Temperature Range: 
150 ºC
Maximum Load: 

Singe and prime. No Resist allowed!

Lab Organization, Location, and Badger Information

Lab Organization: 
Badger Area: 
nSiL: L104 Stinson
Badger ID: 

Training and Maintenance

Lab Facility: 
Training Charges: 
0.00 hours
Primary Trainer: 
Backup Trainer(s): 
Primary Maintenance: 
Backup Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. "All Litho" class is required before training on any of the lithography tools. Please send an email to to sign up for the All Litho class. Read more here: All Litho class.
  2. Contact the primary trainer: Swaroop Kommera