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Stanford Nanofabrication Facility
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Filmetrics
Reflectance Spectrometer Filmetrics F40 (filmetrics)
Cleanliness:
All
Processing Technique(s)
Characterization
>
Reflectometry
Capabilities and Specifications
Maximum Load:
one piece or wafer
Lab Organization, Location, and Badger Information
Lab Organization:
Stanford Nanofabrication Facility (SNF)
Location:
SNF Cleanroom Paul G Allen L107
Badger Area:
SNF: Characterization and Testing
Badger ID:
filmetrics
Training and Maintenance
Lab Facility:
SNF
Primary Trainer:
Swaroop Kommera
Backup Trainer(s):
Cliff Knollenberg
Primary Maintenance:
Gary Sosa
Backup Maintenance:
Mario Vilanova
Steps to become a tool user
Become a
member of SNF
.
Contact the primary trainer:
Swaroop Kommera
Operating Instructions
Filmetrics