Tencor P2 Profilometer (p2)
The Tencor P2 Long Scan Profiler is a surface profiler that measures step heights.
Pieces to 8 inch wafers
Stepheight 500 Å to 80µm
Scan length 0.01 mm to 210 mm.
Stylus Radius 12.5 µm
Capabilities and Specifications
Process Temperature Range:
Step height measurement range 500 Å to 80 µm
Lab Organization, Location, and Badger Information
SNF: Characterization and Testing
Training and Maintenance
Steps to become a tool user
Read the relevant operating procedures:
Shadowing is required. Contact a qualified lab member of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool. Please follow the instructions on this form: Shadowing at SNF