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Tencor P2 Profilometer (p2)

Overview

The Tencor P2 Long Scan Profiler is a surface profiler that measures step heights. Pieces to 8 inch wafers Stepheight 500 Å to 80µm Scan length 0.01 mm to 210 mm. Stylus Radius 12.5 µm
Cleanliness: 

Capabilities and Specifications

Process Temperature Range: 
Maximum Load: 
1
Notes: 

Step height measurement range 500 Å to 80 µm

Lab Facility, Location, and Badger Information

Training and Maintenance

Lab Facility: 
Training Charges: 
0.50 hours
Primary Trainer: 
Primary Maintenance: 
Backup Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. Read the relevant operating procedures:
  2. Shadowing: Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the . We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool.
    Print the SNF Training Shadowing Form on clean room paper.
  3. Sign up for the relevant training scheduled in .
  4. Contact the primary trainer: .

Operating Instructions