Tencor P2 Profilometer (p2)
The Tencor P2 Long Scan Profiler is a surface profiler that measures step heights.
Pieces to 8 inch wafers
Stepheight 500 Å to 80µm
Scan length 0.01 mm to 210 mm.
Stylus Radius 12.5 µm
Capabilities and Specifications
Process Temperature Range:
Step height measurement range 500 Å to 80 µm
Lab Facility, Location, and Badger Information
Training and Maintenance
Steps to become a tool user
Read the relevant operating procedures:
Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the . We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool.
Print the SNF Training Shadowing Form
on clean room paper.
Sign up for the relevant training scheduled in