Tencor P2 Profilometer (p2)
Overview
The Tencor P2 Long Scan Profiler is a surface profiler that measures step heights. Pieces to 8 inch wafers Stepheight 500 Å to 80µm Scan length 0.01 mm to 210 mm. Stylus Radius 12.5 µm
Processing Technique(s)
Capabilities and Specifications
Substrate Type
Substrate Sizes
Maximum Load:
1
Notes:
Step height measurement range 500 Å to 80 µm
Lab Organization, Location, and NEMO Information
Lab Organization:
Location:
NEMO Area:
SNF: Characterization and Testing
NEMO ID:
p2
Training and Maintenance
Lab Facility:
Training Charges:
0.50 hours
Primary Trainer:
Primary Maintenance:
Backup Maintenance:
Steps to become a tool user
-
Become a member of SNF.
- Study the relevant operating procedures:
- Shadowing is required. Contact a qualified lab member of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool. Please follow the instructions on this form: Shadowing at SNF
- Contact the primary trainer: Uli Thumser
