Ex Fab Solvent Wet Bench (wbexfab_solv)
Exfab solvent wet bench (wbexfab_solv, wbexfab_plug - badger names) is for wet chemical processing with solvents of standard and non-standard materials (flexible) like glass and standard/non-standard metals for pieces and wafers up to 6 inch. Headway 3 is for spinning resist or other materials (non-standard resists and materials need to be approved prior to spinning in Headway 3). The Equipment Group is determined by the cleanliness of the labware. This wetbench contains Headway3, two hot plates for post resist spin processing, one explosion proof hot plate, one ultrasonic bath and there is room for manual processing in beakers.
Once you are trained on the tool, please join the tool discussion list. The instruction and the lists are located at https://snfexfab.stanford.edu/snf/join/discussion-lists
Capabilities and Specifications
Process Temperature Range:
Lab Facility, Location, and Badger Information
Training and Maintenance
Steps to become a tool user
Read the relevant operating procedures:
**ALL SHADOWING MUST BE APPROVED BY SNF STAFF BEFORE SHADOWING SESSION AS PART OF NEW NORMAL POLICIES** Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the Discussion Lists
. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool.
Print the SNF Training Shadowing Form
on clean room paper.