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EVG 101 Spray Coater (evgspraycoat)

Cleanliness: 

Capabilities and Specifications

Lithography Specifications

Resist: 
Process Temperature Range: 
Maximum Load: 
1
Notes: 

Spray coating of resists

Lab Organization, Location, and Badger Information

Badger Area: 
SNF: Photolithography
Badger ID: 
evgspraycoat

Training and Maintenance

Lab Facility: 
Training Charges: 
1.50 hours
Primary Trainer: 
Backup Trainer(s): 
Primary Maintenance: 
Backup Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. "All Litho" class is required before training on any of the lithography tools. Please send an email to all-litho-training@lists.stanford.edu to sign up for the All Litho class. Read more here: All Litho class.
  2. Read the relevant operating procedures:
  3. Contact the primary trainer: .
  4. Shadowing is required. Contact a qualified lab member of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool. Please follow the instructions on this form: Shadowing at SNF

Operating Instructions