SVG Develop Track 2 (svgdev2)
Overview
The SVG (Silicon Valley Group) developer is an automated system with two independent tracks (svgdev and svgdev2) for developing and post-baking exposed photoresist-coated 4" wafers. Each track system includes two stations: a spin station which dispenses developer and rinses with DI water; and an oven station for post-bake.
Cleanliness:
Processing Technique(s)
Capabilities and Specifications
Lithography Specifications
Developer:
Process Temperature Range:
Substrate Type
Substrate Sizes
Maximum Load:
25 4 inch wafers
Notes:
Automatic development.
Lab Facility, Location, and Badger Information
Lab Organization:
Location:
Badger Area:
Badger ID:
svgdev2
Training and Maintenance
Lab Facility:
Training Charges:
0.50 hours
Primary Trainer:
Backup Trainer(s):
Primary Maintenance:
Backup Maintenance:
Steps to become a tool user
-
Become a member of SNF.
- "All Litho" class is required before training on any of the lithography tools. Please send an email to all-litho-training@lists.stanford.edu to sign up for the All Litho class. Read more here: All Litho class.
- View the SVG Developer Track movie.
- Read the relevant operating procedures:
- Shadowing: Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the . We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool.
Follow the instructions on this form: SNF Training Shadowing Form and this checklist: SVG Resist Develop tracks 1 and 2 Checklist - Sign up for the relevant training scheduled in .
- Contact the primary trainer: .
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