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SVG Develop Track 1 (svgdev)

Overview

SVGdev1 back track

The SVG (Silicon Valley Group) developer is an automated system with two independent tracks (svgdev and svgdev2) for developing and post-baking exposed photoresist-coated 4" wafers. Each track system includes two stations: a spin station which dispenses developer and rinses with DI water; and an oven station for post-bake.

Cleanliness: 

Capabilities and Specifications

Lithography Specifications

Developer: 
Process Temperature Range: 
Maximum Load: 
25 4 inch wafers
Notes: 

Automatic development.

Lab Facility, Location, and Badger Information

Training and Maintenance

SVGdev1and2 back and front track
Lab Facility: 
Training Charges: 
0.50 hours
Primary Trainer: 
Backup Trainer(s): 
Primary Maintenance: 
Backup Maintenance: 

Steps to become a tool user

  1. Become a member of SNF.
  1. "All Litho" class is required before training on any of the lithography tools. Please send an email to all-litho-training@lists.stanford.edu to sign up for the All Litho class. Read more here: All Litho class.
  2. View the SVG Developer Track movie.
  3. Read the relevant operating procedures:
  4. Shadowing: Contact a qualified user of the tool to arrange to ‘shadow’. It would be best to find someone who has used the system often. If you don’t know of anyone, you may check reservations or history to find a qualified user. You may also contact the . We recommend that you be with the lab member for the full time while operating the tool and ask lots of questions during the shadowing. You may have to shadow a qualified user more than one time to be comfortable with the tool.
    Follow the instructions on this form: SNF Training Shadowing Form and this checklist: SVG Resist Develop tracks 1 and 2 Checklist
  5. Sign up for the relevant training scheduled in .
  6. Contact the primary trainer: .

Operating Instructions