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Diethylenetriamine

Preferred Short Name: 
DETA
Chemical Formula: 
HN(CH2CH2NH2)2

Equipment Tabs

Deposition Equipment
Partial words okay.
Deposition Equipment
Equipment name & Badger ID Cleanliness Location Material Thickness Range Approved Materials supplied by Lab
MVD
mvd
SNF Cleanroom Paul G Allen L107
1 Å - 50 nm
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