Zirconium

Chemical Formula:

Zr

Equipment Tabs

Deposition Equipment

Deposition Equipment
Equipment name & Badger ID	Cleanliness	Location	Material Thickness Range	Approved Materials supplied by Lab
AJA2 Evaporator aja2-evap	Semiclean	SNF Cleanroom Paul G Allen L107	0 - 300 nm	Ag Al Co Cr Ge Hf Mo Nb Pd Pt Si Ta Ti V W Zr
Intlvac Evaporation Intlvac_evap	Clean Semiclean	SNF Cleanroom Paul G Allen L107	0 - 1 μm	Al Co Cr Ge Hf Mo Nb Ni Pd Si Ta Ti V W Zr