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Stanford Nanofabrication Facility
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1.0 General Policies
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Zirconium
Chemical Formula:
Zr
Equipment Tabs
Deposition Equipment
Equipment name or Badger ID
Partial words okay.
Deposition Equipment
Equipment name & Badger ID
Cleanliness
Location
Material Thickness Range
Approved Materials supplied by Lab
AJA2 Evaporator
aja2-evap
Semiclean
SNF Cleanroom Paul G Allen L107
0.00
-
300.00 nm
Ag
Al
Co
Cr
Ge
Hf
Mo
Nb
Pd
Pt
Si
Ta
Ti
V
W
Zr
Intlvac Evaporator
Intlvac_evap
Clean
Semiclean
SNF Cleanroom Paul G Allen L107
0.00
-
0.50 μm
Al
Co
Cr
Ge
Hf
Mo
Nb
Ni
Pd
Si
Ta
Ti
V
W
Zr
