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Silicon Germanium

Chemical Formula: 
SiGe

A deposited layer of SiGe.  The ratio of Si to Ge can be controlled and will vary depending on the application.

Equipment Tabs

Deposition Equipment
Partial words okay.
Deposition Equipment
Equipment name & Badger ID Cleanliness Location Material Thickness Range Approved Materials supplied by Lab
AMAT Centurion Epitaxial System
epi2
SNF Cleanroom Paul G Allen L107
50.00 Å - 3.00 μm
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